Laser induced die transferring and patterning

Gerardus Richardus, Bernardus, Engelina Römer

Laser induced die transferring and patterning

Gerardus Richardus, Bernardus, Engelina Römer

Faculty of Engineering Technology

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic

Abstract

The benefits of the use of lasers in the field of assembly of heterogeneous microsystems is demonstrated, by two applications. First, a laser induced pyrolitic process successfully transfers an chip (semiconductior die) from its carrier onto a receiving substrate. Secondly, a laser induced photolitic processes creates a hyhdrophobic/phillic pattern required for fluidic self-alignment of micro-fabricated components

Original language	English
Title of host publication	Unknown
Place of Publication	Karlsruhe, Germany
Publisher	IEEE
Pages	-
Publication status	Published - 10 May 2013
Event	Workshop Microassembly: Robotics and Beyond 2013 - Karlsruhe, Germany Duration: 10 May 2013 → 10 May 2013 http://autsys.aalto.fi/en/MicroNanoRobotics/ICRA2013Workshop

Publication series

Name
Publisher	IEEE

Conference

Conference	Workshop Microassembly: Robotics and Beyond 2013
Country/Territory	Germany
City	Karlsruhe
Period	10/05/13 → 10/05/13
Internet address	http://autsys.aalto.fi/en/MicroNanoRobotics/ICRA2013Workshop

Keywords

IR-85902
METIS-296012

Cite this

@inproceedings{0753aed9ba9f4df7850c354775a02436,

title = "Laser induced die transferring and patterning",

abstract = "The benefits of the use of lasers in the field of assembly of heterogeneous microsystems is demonstrated, by two applications. First, a laser induced pyrolitic process successfully transfers an chip (semiconductior die) from its carrier onto a receiving substrate. Secondly, a laser induced photolitic processes creates a hyhdrophobic/phillic pattern required for fluidic self-alignment of micro-fabricated components",

keywords = "IR-85902, METIS-296012",

author = "R{\"o}mer, {Gerardus Richardus, Bernardus, Engelina}",

year = "2013",

month = may,

day = "10",

language = "English",

publisher = "IEEE",

pages = "--",

booktitle = "Unknown",

address = "United States",

note = "Workshop Microassembly: Robotics and Beyond 2013 ; Conference date: 10-05-2013 Through 10-05-2013",

url = "http://autsys.aalto.fi/en/MicroNanoRobotics/ICRA2013Workshop",

}

TY - GEN

T1 - Laser induced die transferring and patterning

AU - Römer, Gerardus Richardus, Bernardus, Engelina

PY - 2013/5/10

Y1 - 2013/5/10

N2 - The benefits of the use of lasers in the field of assembly of heterogeneous microsystems is demonstrated, by two applications. First, a laser induced pyrolitic process successfully transfers an chip (semiconductior die) from its carrier onto a receiving substrate. Secondly, a laser induced photolitic processes creates a hyhdrophobic/phillic pattern required for fluidic self-alignment of micro-fabricated components

AB - The benefits of the use of lasers in the field of assembly of heterogeneous microsystems is demonstrated, by two applications. First, a laser induced pyrolitic process successfully transfers an chip (semiconductior die) from its carrier onto a receiving substrate. Secondly, a laser induced photolitic processes creates a hyhdrophobic/phillic pattern required for fluidic self-alignment of micro-fabricated components

KW - IR-85902

KW - METIS-296012

M3 - Conference contribution

SP - -

BT - Unknown

PB - IEEE

CY - Karlsruhe, Germany

T2 - Workshop Microassembly: Robotics and Beyond 2013

Y2 - 10 May 2013 through 10 May 2013

ER -

Laser induced die transferring and patterning

Abstract

Publication series

Conference

Keywords

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Cite this