Abstract
Low spatial frequency Laser-induced Periodic Surface Structures (LSFL) have been created on single crystal silicon with picosecond laser pulses with a wavelength of λ =1030nm with varying laser spot diameters obtained by a defocused laser beam. The laser processing parameters have been adjusted theoretically and experimentally to obtain similar LSFL for all studied laser spot diameters. The periodicity and amplitude of the LSFL were measured by SEM and AFM analysis. It has been found that the periodicities of the LSFL do not change when LSFL were created with larger laser spot diameters. The amplitudes of the LSFL decrease with increasing laser spot diameters, although this correlation is not strong.
Original language | English |
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Title of host publication | Laser-based Micro- and Nanoprocessing XIII |
Editors | Udo Klotzbach, Akira Watanabe, Rainer Kling |
Place of Publication | Washington DC |
Publisher | SPIE |
Number of pages | 11 |
Volume | 10906 |
ISBN (Electronic) | 9781510624542 |
DOIs | |
Publication status | Published - 4 Mar 2019 |
Event | Laser-based Micro- and Nanoprocessing XIII 2019 - The Moscone Center, San Francisco, United States Duration: 2 Feb 2019 → 7 Feb 2019 Conference number: 13 |
Publication series
Name | Proceedings of the SPIE |
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Publisher | The International Society for Optical Engineering, SPIE |
Volume | 10906 |
ISSN (Print) | 0277-786X |
Conference
Conference | Laser-based Micro- and Nanoprocessing XIII 2019 |
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Abbreviated title | SPIE LASE 2019 |
Country/Territory | United States |
City | San Francisco |
Period | 2/02/19 → 7/02/19 |