Laser-induced periodic surface structures (LIPSS) manufacturing by defocused laser processing

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    Low spatial frequency Laser-induced Periodic Surface Structures (LSFL) have been created on single crystal silicon with picosecond laser pulses with a wavelength of λ =1030nm with varying laser spot diameters obtained by a defocused laser beam. The laser processing parameters have been adjusted theoretically and experimentally to obtain similar LSFL for all studied laser spot diameters. The periodicity and amplitude of the LSFL were measured by SEM and AFM analysis. It has been found that the periodicities of the LSFL do not change when LSFL were created with larger laser spot diameters. The amplitudes of the LSFL decrease with increasing laser spot diameters, although this correlation is not strong.
    Original languageEnglish
    Title of host publicationLaser-based Micro- and Nanoprocessing XIII
    EditorsUdo Klotzbach, Akira Watanabe, Rainer Kling
    Place of PublicationWashington DC
    Number of pages11
    ISBN (Electronic)9781510624542
    Publication statusPublished - 4 Mar 2019
    EventLaser-based Micro- and Nanoprocessing XIII 2019 - The Moscone Center, San Francisco, United States
    Duration: 2 Feb 20197 Feb 2019
    Conference number: 13

    Publication series

    NameProceedings of the SPIE
    PublisherThe International Society for Optical Engineering, SPIE
    ISSN (Print)0277-786X


    ConferenceLaser-based Micro- and Nanoprocessing XIII 2019
    Abbreviated titleSPIE LASE 2019
    Country/TerritoryUnited States
    CitySan Francisco


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