Laser-induced periodic surface structures (LIPSS) manufacturing by defocused laser processing

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    Abstract

    Low spatial frequency Laser-induced Periodic Surface Structures (LSFL) have been created on single crystal silicon with picosecond laser pulses with a wavelength of λ =1030nm with varying laser spot diameters obtained by a defocused laser beam. The laser processing parameters have been adjusted theoretically and experimentally to obtain similar LSFL for all studied laser spot diameters. The periodicity and amplitude of the LSFL were measured by SEM and AFM analysis. It has been found that the periodicities of the LSFL do not change when LSFL were created with larger laser spot diameters. The amplitudes of the LSFL decrease with increasing laser spot diameters, although this correlation is not strong.
    Original languageEnglish
    Title of host publicationLaser-based Micro- and Nanoprocessing XIII
    EditorsUdo Klotzbach, Akira Watanabe, Rainer Kling
    Place of PublicationWashington DC
    PublisherSPIE
    Number of pages11
    Volume10906
    ISBN (Electronic)9781510624542
    DOIs
    Publication statusPublished - 4 Mar 2019
    EventLaser-based Micro- and Nanoprocessing XIII 2019 - The Moscone Center, San Francisco, United States
    Duration: 2 Feb 20197 Feb 2019
    Conference number: 13

    Publication series

    NameProceedings of the SPIE
    PublisherThe International Society for Optical Engineering, SPIE
    Volume10906
    ISSN (Print)0277-786X

    Conference

    ConferenceLaser-based Micro- and Nanoprocessing XIII 2019
    Abbreviated titleSPIE LASE 2019
    CountryUnited States
    CitySan Francisco
    Period2/02/197/02/19

    Fingerprint

    manufacturing
    lasers
    periodic variations
    atomic force microscopy
    laser beams
    scanning electron microscopy
    single crystals
    silicon
    pulses
    wavelengths

    Cite this

    Mezera, M., & Römer, G. R. B. E. (2019). Laser-induced periodic surface structures (LIPSS) manufacturing by defocused laser processing. In U. Klotzbach, A. Watanabe, & R. Kling (Eds.), Laser-based Micro- and Nanoprocessing XIII (Vol. 10906). [109060U] (Proceedings of the SPIE; Vol. 10906). Washington DC: SPIE. https://doi.org/10.1117/12.2510004
    Mezera, Marek ; Römer, Gerardus Richardus, Bernardus, Engelina. / Laser-induced periodic surface structures (LIPSS) manufacturing by defocused laser processing. Laser-based Micro- and Nanoprocessing XIII. editor / Udo Klotzbach ; Akira Watanabe ; Rainer Kling. Vol. 10906 Washington DC : SPIE, 2019. (Proceedings of the SPIE).
    @inproceedings{a8569602f9e746fc8caac34b05f417ab,
    title = "Laser-induced periodic surface structures (LIPSS) manufacturing by defocused laser processing",
    abstract = "Low spatial frequency Laser-induced Periodic Surface Structures (LSFL) have been created on single crystal silicon with picosecond laser pulses with a wavelength of λ =1030nm with varying laser spot diameters obtained by a defocused laser beam. The laser processing parameters have been adjusted theoretically and experimentally to obtain similar LSFL for all studied laser spot diameters. The periodicity and amplitude of the LSFL were measured by SEM and AFM analysis. It has been found that the periodicities of the LSFL do not change when LSFL were created with larger laser spot diameters. The amplitudes of the LSFL decrease with increasing laser spot diameters, although this correlation is not strong.",
    author = "Marek Mezera and R{\"o}mer, {Gerardus Richardus, Bernardus, Engelina}",
    year = "2019",
    month = "3",
    day = "4",
    doi = "10.1117/12.2510004",
    language = "English",
    volume = "10906",
    series = "Proceedings of the SPIE",
    publisher = "SPIE",
    editor = "Udo Klotzbach and Akira Watanabe and Rainer Kling",
    booktitle = "Laser-based Micro- and Nanoprocessing XIII",
    address = "United States",

    }

    Mezera, M & Römer, GRBE 2019, Laser-induced periodic surface structures (LIPSS) manufacturing by defocused laser processing. in U Klotzbach, A Watanabe & R Kling (eds), Laser-based Micro- and Nanoprocessing XIII. vol. 10906, 109060U, Proceedings of the SPIE, vol. 10906, SPIE, Washington DC, Laser-based Micro- and Nanoprocessing XIII 2019, San Francisco, United States, 2/02/19. https://doi.org/10.1117/12.2510004

    Laser-induced periodic surface structures (LIPSS) manufacturing by defocused laser processing. / Mezera, Marek ; Römer, Gerardus Richardus, Bernardus, Engelina.

    Laser-based Micro- and Nanoprocessing XIII. ed. / Udo Klotzbach; Akira Watanabe; Rainer Kling. Vol. 10906 Washington DC : SPIE, 2019. 109060U (Proceedings of the SPIE; Vol. 10906).

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

    TY - GEN

    T1 - Laser-induced periodic surface structures (LIPSS) manufacturing by defocused laser processing

    AU - Mezera, Marek

    AU - Römer, Gerardus Richardus, Bernardus, Engelina

    PY - 2019/3/4

    Y1 - 2019/3/4

    N2 - Low spatial frequency Laser-induced Periodic Surface Structures (LSFL) have been created on single crystal silicon with picosecond laser pulses with a wavelength of λ =1030nm with varying laser spot diameters obtained by a defocused laser beam. The laser processing parameters have been adjusted theoretically and experimentally to obtain similar LSFL for all studied laser spot diameters. The periodicity and amplitude of the LSFL were measured by SEM and AFM analysis. It has been found that the periodicities of the LSFL do not change when LSFL were created with larger laser spot diameters. The amplitudes of the LSFL decrease with increasing laser spot diameters, although this correlation is not strong.

    AB - Low spatial frequency Laser-induced Periodic Surface Structures (LSFL) have been created on single crystal silicon with picosecond laser pulses with a wavelength of λ =1030nm with varying laser spot diameters obtained by a defocused laser beam. The laser processing parameters have been adjusted theoretically and experimentally to obtain similar LSFL for all studied laser spot diameters. The periodicity and amplitude of the LSFL were measured by SEM and AFM analysis. It has been found that the periodicities of the LSFL do not change when LSFL were created with larger laser spot diameters. The amplitudes of the LSFL decrease with increasing laser spot diameters, although this correlation is not strong.

    U2 - 10.1117/12.2510004

    DO - 10.1117/12.2510004

    M3 - Conference contribution

    VL - 10906

    T3 - Proceedings of the SPIE

    BT - Laser-based Micro- and Nanoprocessing XIII

    A2 - Klotzbach, Udo

    A2 - Watanabe, Akira

    A2 - Kling, Rainer

    PB - SPIE

    CY - Washington DC

    ER -

    Mezera M, Römer GRBE. Laser-induced periodic surface structures (LIPSS) manufacturing by defocused laser processing. In Klotzbach U, Watanabe A, Kling R, editors, Laser-based Micro- and Nanoprocessing XIII. Vol. 10906. Washington DC: SPIE. 2019. 109060U. (Proceedings of the SPIE). https://doi.org/10.1117/12.2510004