Laser-induced periodic surface structures (LIPSS) manufacturing by defocused laser processing

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    Abstract

    Low spatial frequency Laser-induced Periodic Surface Structures (LSFL) have been created on single crystal silicon with picosecond laser pulses with a wavelength of λ =1030nm with varying laser spot diameters obtained by a defocused laser beam. The laser processing parameters have been adjusted theoretically and experimentally to obtain similar LSFL for all studied laser spot diameters. The periodicity and amplitude of the LSFL were measured by SEM and AFM analysis. It has been found that the periodicities of the LSFL do not change when LSFL were created with larger laser spot diameters. The amplitudes of the LSFL decrease with increasing laser spot diameters, although this correlation is not strong.
    Original languageEnglish
    Title of host publicationLaser-based Micro- and Nanoprocessing XIII
    EditorsUdo Klotzbach, Akira Watanabe, Rainer Kling
    Place of PublicationWashington DC
    PublisherSPIE
    Number of pages11
    Volume10906
    ISBN (Electronic)9781510624542
    DOIs
    Publication statusPublished - 4 Mar 2019
    EventLaser-based Micro- and Nanoprocessing XIII 2019 - The Moscone Center, San Francisco, United States
    Duration: 2 Feb 20197 Feb 2019
    Conference number: 13

    Publication series

    NameProceedings of the SPIE
    PublisherThe International Society for Optical Engineering, SPIE
    Volume10906
    ISSN (Print)0277-786X

    Conference

    ConferenceLaser-based Micro- and Nanoprocessing XIII 2019
    Abbreviated titleSPIE LASE 2019
    CountryUnited States
    CitySan Francisco
    Period2/02/197/02/19

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  • Cite this

    Mezera, M., & Römer, G. R. B. E. (2019). Laser-induced periodic surface structures (LIPSS) manufacturing by defocused laser processing. In U. Klotzbach, A. Watanabe, & R. Kling (Eds.), Laser-based Micro- and Nanoprocessing XIII (Vol. 10906). [109060U] (Proceedings of the SPIE; Vol. 10906). Washington DC: SPIE. https://doi.org/10.1117/12.2510004