Laser machining by short and ultrashort pulses, state of the art

J. Meijer, K. Du, D. Hoffmann, V.S. Kovalenko, T. Masuzawa, A Ostendorf, R. Poprawe, W. Schulz

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Abstract

An overview is given of the applications of short and ultrashort lasers in material processing. Shorter pulses reduce heat-affected damage of the material and opens new ways for nanometer accuracy. Even forty years after the development of the laser there is a lot of effort in developing new and better performing concepts of lasers. The driving force is higher accuracy at reasonable cost, which is realised by compact systems delivering short laser pulses of high beam quality. Another trend is the shift towards shorter wavelengths, which are better absorbed by the material and which allows smaller feature sizes to be produced. Examples of new products, which became possible by this technique, are given. The trends in miniaturization QS predicted by Moore and Tanigychi are expected to continue over the next decade too thanks to short and ultrashort laser machining techniques.
Original languageUndefined
Pages (from-to)10-38
JournalMikroniek
Volume43
Issue number3
Publication statusPublished - 2003

Keywords

  • IR-97749
  • METIS-215666

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