Laser micro-machining of sharp edged receptor sites in pulyimide for fluid driven self-alignment

Gerardus Richardus, Bernardus, Engelina Römer, D. Arnaldo del Cerro, M.M.J. Jorritsma, Ralph Pohl, B. Chang, V. Liimatainen, Q. Zhou, Bert Huis in 't Veld

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

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Original languageUndefined
Title of host publicationProceedings of LPM2012, the 13th International Symposium on Laser Precision Microfabrication
Place of PublicationWashington, USA
PublisherJapan-Laser-Processing-Society
Pages1-7
Number of pages7
Publication statusPublished - 11 Jun 2012
Event13th International Symposium on Laser Precision Microfabrication, LPM 2012 - Washington, United States
Duration: 11 Jun 201214 Jun 2012
Conference number: 12

Publication series

Name
PublisherJapan-Laser-Processing-Society

Conference

Conference13th International Symposium on Laser Precision Microfabrication, LPM 2012
Abbreviated titleLPM
Country/TerritoryUnited States
CityWashington
Period11/06/1214/06/12

Keywords

  • EC Grant Agreement nr.: FP7/260079
  • IR-80603
  • METIS-286894

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