Laser micro/nanoprocessing and subsequent chemical etching of sapphire for surface and bulk functionalization

Material Science

• Al2O3 18%
• Amorphous Material 27%
• Chemical Property 9%
• Crystalline Material 27%
• Dry Etching 9%
• Irradiation 9%
• Laser 100%
• Laser Material 9%
• Laser Pulse 36%
• Laser Source 18%
• Material 36%
• Material Processing 9%
• Microfluidics 9%
• Microstructure 9%
• Molecular Structure 9%
• Morphology 9%
• Physical Property 9%
• Sapphire 100%
• Surface 100%
• Wet Etching 9%

Engineering

• Dry Etching 10%
• Femtosecond 10%
• Femtosecond Laser 10%
• Fields 10%
• Functionalization 100%
• Laser Beam 10%
• Laser Irradiation 10%
• Laser Material Interaction 10%
• Laser Parameter 10%
• Laser Processing 30%
• Laser Pulse Duration 10%
• Laser Pulse Energy 10%
• Microfluidic Channel 10%
• Microstructure 10%
• Molecular Structure 10%
• Non-Linear Effect 10%
• Obtains 10%
• Physical Phenomenon 10%
• Picosecond 10%
• Picosecond Laser 10%
• Processing 10%
• Processing Condition 10%
• Processing Method 10%
• Processing Step 10%
• Processing Technique 10%
• Pulse Repetition Rate 10%
• Pulsed Laser 10%
• Radiation 10%
• Sapphire Substrate 10%
• Sawing 10%
• Short Pulse Laser 10%
• Smartphone 10%
• Subsurface 10%
• Surfaces 100%