Laser processing in 3D Integration of Heterogeneous Microsystems

Ralph Pohl, R. Pohl, Gerardus Richardus, Bernardus, Engelina Römer, Bert Huis in 't Veld

Research output: Contribution to conference › Poster › Other research output

LanguageEnglish
Pages-
Number of pages1
Publication statusPublished - 19 Jun 2012

Keywords

  • METIS-289951
  • IR-80602
  • EC Grant Agreement nr.: FP7/260079

Cite this

Pohl, Ralph ; Pohl, R. ; Römer, Gerardus Richardus, Bernardus, Engelina ; Huis in 't Veld, Bert. / Laser processing in 3D Integration of Heterogeneous Microsystems. 1 p.
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author = "Ralph Pohl and R. Pohl and R{\"o}mer, {Gerardus Richardus, Bernardus, Engelina} and {Huis in 't Veld}, Bert",
year = "2012",
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Pohl, R, Pohl, R, Römer, GRBE & Huis in 't Veld, B 2012, 'Laser processing in 3D Integration of Heterogeneous Microsystems' pp. -.

Laser processing in 3D Integration of Heterogeneous Microsystems. / Pohl, Ralph; Pohl, R.; Römer, Gerardus Richardus, Bernardus, Engelina; Huis in 't Veld, Bert.

2012. -.

Research output: Contribution to conference › Poster › Other research output

TY - CONF

T1 - Laser processing in 3D Integration of Heterogeneous Microsystems

AU - Pohl, Ralph

AU - Pohl, R.

AU - Römer, Gerardus Richardus, Bernardus, Engelina

AU - Huis in 't Veld, Bert

PY - 2012/6/19

Y1 - 2012/6/19

KW - METIS-289951

KW - IR-80602

KW - EC Grant Agreement nr.: FP7/260079

M3 - Poster

SP - -

ER -

Pohl R, Pohl R, Römer GRBE, Huis in 't Veld B. Laser processing in 3D Integration of Heterogeneous Microsystems. 2012.

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