Laser processing in 3D Integration of Heterogeneous Microsystems

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@conference{adce9b7edf6b4e27a8b430ab51f960f0,

title = "Laser processing in 3D Integration of Heterogeneous Microsystems",

keywords = "METIS-289951, IR-80602, EC Grant Agreement nr.: FP7/260079",

author = "Ralph Pohl and R. Pohl and R{\"o}mer, {Gerardus Richardus, Bernardus, Engelina} and {Huis in 't Veld}, Bert",

year = "2012",

month = jun,

day = "19",

language = "English",

pages = "--",

}