@conference{adce9b7edf6b4e27a8b430ab51f960f0,
title = "Laser processing in 3D Integration of Heterogeneous Microsystems",
keywords = "METIS-289951, IR-80602, EC Grant Agreement nr.: FP7/260079",
author = "Ralph Pohl and R. Pohl and R{\"o}mer, {Gerardus Richardus, Bernardus, Engelina} and {Huis in 't Veld}, Bert",
year = "2012",
month = jun,
day = "19",
language = "English",
pages = "--",
note = "Industrial Technologies 2012; Integrating nano, materials and production ; Conference date: 19-06-2012 Through 21-06-2012",
}