Laser processing in 3D Integration of Heterogeneous Microsystems

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Original language	English
Pages	-
Number of pages	1
Publication status	Published - 19 Jun 2012
Event	Industrial Technologies 2012; Integrating nano, materials and production - Aarhus, Denmark Duration: 19 Jun 2012 → 21 Jun 2012

Conference	Industrial Technologies 2012; Integrating nano, materials and production
City	Aarhus, Denmark
Period	19/06/12 → 21/06/12

Keywords

@conference{adce9b7edf6b4e27a8b430ab51f960f0,

title = "Laser processing in 3D Integration of Heterogeneous Microsystems",

keywords = "METIS-289951, IR-80602, EC Grant Agreement nr.: FP7/260079",

author = "Ralph Pohl and R. Pohl and R{\"o}mer, {Gerardus Richardus, Bernardus, Engelina} and {Huis in 't Veld}, Bert",

year = "2012",

month = jun,

day = "19",

language = "English",

pages = "--",

note = "Industrial Technologies 2012; Integrating nano, materials and production ; Conference date: 19-06-2012 Through 21-06-2012",

}

TY - CONF

T1 - Laser processing in 3D Integration of Heterogeneous Microsystems

AU - Pohl, Ralph

AU - Pohl, R.

AU - Römer, Gerardus Richardus, Bernardus, Engelina

AU - Huis in 't Veld, Bert

PY - 2012/6/19

Y1 - 2012/6/19

KW - METIS-289951

KW - IR-80602

KW - EC Grant Agreement nr.: FP7/260079

M3 - Poster

SP - -

T2 - Industrial Technologies 2012; Integrating nano, materials and production

Y2 - 19 June 2012 through 21 June 2012

ER -