Laser processing in 3D Integration of Heterogeneous Microsystems

Research output: Contribution to conferencePosterOther research output

LanguageEnglish
Pages-
Number of pages1
Publication statusPublished - 19 Jun 2012

Keywords

  • METIS-289951
  • IR-80602
  • EC Grant Agreement nr.: FP7/260079

Cite this

@conference{adce9b7edf6b4e27a8b430ab51f960f0,
title = "Laser processing in 3D Integration of Heterogeneous Microsystems",
keywords = "METIS-289951, IR-80602, EC Grant Agreement nr.: FP7/260079",
author = "Ralph Pohl and R. Pohl and R{\"o}mer, {Gerardus Richardus, Bernardus, Engelina} and {Huis in 't Veld}, Bert",
year = "2012",
month = "6",
day = "19",
language = "English",
pages = "--",

}

Laser processing in 3D Integration of Heterogeneous Microsystems. / Pohl, Ralph; Pohl, R.; Römer, Gerardus Richardus, Bernardus, Engelina; Huis in 't Veld, Bert.

2012. -.

Research output: Contribution to conferencePosterOther research output

TY - CONF

T1 - Laser processing in 3D Integration of Heterogeneous Microsystems

AU - Pohl, Ralph

AU - Pohl, R.

AU - Römer, Gerardus Richardus, Bernardus, Engelina

AU - Huis in 't Veld, Bert

PY - 2012/6/19

Y1 - 2012/6/19

KW - METIS-289951

KW - IR-80602

KW - EC Grant Agreement nr.: FP7/260079

M3 - Poster

SP - -

ER -