Laser processing in 3D Integration of Heterogeneous Microsystems

R. Pohl; G.R.B.E. Römer; A.J. Huis in 't Veld

Laser processing in 3D Integration of Heterogeneous Microsystems

R. Pohl
, G.R.B.E. Römer
, A.J. Huis in 't Veld

Faculty of Engineering Technology

Research output: Contribution to conference › Poster › Other research output

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Abstract

Material processing using Ultra Short Pulsed Laser sources is an efficient and precise technology for 3D integration of heterogeneous microsystems. Within the framework of the FAB2ASM project, the University of Twente investigates multiple laser based processes, such as: laser created receptor sites for fluidic self-alignment, laser drilling and laser based deposition of metal droplets.

Original language	English
Number of pages	1
Publication status	Published - 19 Jun 2012
Event	Industrial Technologies 2012; Integrating nano, materials and production - Aarhus, Denmark Duration: 19 Jun 2012 → 21 Jun 2012

Conference

Conference	Industrial Technologies 2012; Integrating nano, materials and production
City	Aarhus, Denmark
Period	19/06/12 → 21/06/12

Keywords

EC Grant Agreement nr.: FP7/260079

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abstract = "Material processing using Ultra Short Pulsed Laser sources is an efficient and precise technology for 3D integration of heterogeneous microsystems. Within the framework of the FAB2ASM project, the University of Twente investigates multiple laser based processes, such as: laser created receptor sites for fluidic self-alignment, laser drilling and laser based deposition of metal droplets.",

keywords = "EC Grant Agreement nr.: FP7/260079",

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AU - Pohl, R.

AU - Römer, G.R.B.E.

AU - Huis in 't Veld, A.J.

PY - 2012/6/19

Y1 - 2012/6/19

N2 - Material processing using Ultra Short Pulsed Laser sources is an efficient and precise technology for 3D integration of heterogeneous microsystems. Within the framework of the FAB2ASM project, the University of Twente investigates multiple laser based processes, such as: laser created receptor sites for fluidic self-alignment, laser drilling and laser based deposition of metal droplets.

AB - Material processing using Ultra Short Pulsed Laser sources is an efficient and precise technology for 3D integration of heterogeneous microsystems. Within the framework of the FAB2ASM project, the University of Twente investigates multiple laser based processes, such as: laser created receptor sites for fluidic self-alignment, laser drilling and laser based deposition of metal droplets.

KW - EC Grant Agreement nr.: FP7/260079

M3 - Poster

T2 - Industrial Technologies 2012; Integrating nano, materials and production

Y2 - 19 June 2012 through 21 June 2012

ER -

Laser processing in 3D Integration of Heterogeneous Microsystems

Abstract

Conference

Keywords

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Cite this