Laterally resolved electrical characterisation of high-K oxides with non-contact Atomic Force Microscopy

Research output: Contribution to conferencePosterOther research output

1 Citation (Scopus)
Original languageUndefined
Pages-
Publication statusPublished - 1 Jun 2005
EventINFOS 2005 - Leuven, Belgium
Duration: 1 Jun 2005 → …

Conference

ConferenceINFOS 2005
CityLeuven, Belgium
Period1/06/05 → …

Keywords

  • METIS-227296

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