Laterally resolved electrical characterisation of high-K oxides with non-contact Atomic Force Microscopy

Research output: Contribution to conference › Poster › Other research output

Original language	Undefined
Pages	-
Publication status	Published - 1 Jun 2005
Event	INFOS 2005 - Leuven, Belgium Duration: 1 Jun 2005 → …

Keywords

@conference{c9c927f8120b472582d7c18fc9fc1dd4,

title = "Laterally resolved electrical characterisation of high-K oxides with non-contact Atomic Force Microscopy",

keywords = "METIS-227296",

author = "Sturm, \{Jacobus Marinus\} and A. Zinine and Herbert Wormeester and R.G. Bankras and J. Holleman and Jurriaan Schmitz and Bene Poelsema",

year = "2005",

month = jun,

day = "1",

language = "Undefined",

pages = "--",

note = "INFOS 2005 ; Conference date: 01-06-2005",

}

TY - CONF

T1 - Laterally resolved electrical characterisation of high-K oxides with non-contact Atomic Force Microscopy

AU - Sturm, Jacobus Marinus

AU - Zinine, A.

AU - Wormeester, Herbert

AU - Bankras, R.G.

AU - Holleman, J.

AU - Schmitz, Jurriaan

AU - Poelsema, Bene

PY - 2005/6/1

Y1 - 2005/6/1

KW - METIS-227296

M3 - Poster

SP - -

T2 - INFOS 2005

Y2 - 1 June 2005

ER -