Lead-free (K0.5Na0.5)NbO3 thin films by pulsed laser deposition driving MEMS-based piezoelectric cantilevers

Duc Minh Nguyen, Jan M. Dekkers, Evert Pieter Houwman, H.T. Vu, Hung N. Vu, Augustinus J.H.M. Rijnders

Research output: Contribution to journalArticleAcademicpeer-review

16 Citations (Scopus)

Abstract

Thin film capacitors of the lead-free (K0.5Na0.5)NbO3 (KNN) with (100) orientation were grown on Pt/Ti/SiO2/SOI (silicon-on-insulator) substrates by pulsed laser deposition. The films are pure phases and do not show other crystal orientations. The remnant polarization Pr, saturation polarization Psat, longitudinal d33,f and transverse (d31,f and e31,f) piezoelectric coefficients of the KNN films were determined (Pr=12.6 µC/cm2, Psat=25.0 µC/cm2, d33,f=58 pm/V, d31,f=−42 pm/V and e31,f=−5.6 C/m2). These values are well comparable with the highest values reported for lead-free films of different compositions and therefore these KNN films form a potential alternative to PZT films in lead-free MEMS applications.
Original languageEnglish
Pages (from-to)413-416
Number of pages4
JournalMaterials letters
Volume164
DOIs
Publication statusPublished - 2016

Keywords

  • METIS-315867
  • IR-100117

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