LEIS analysis of thin Cu films on Ru: an unexpected result on sputter intermixing

Research output: Contribution to conference › Poster › Academic

Original language	English
Publication status	Unpublished - 19 May 2022
Event	LEIS Workshop 2022 - Brno Duration: 19 May 2022 → 19 May 2022

Cite this

@conference{73704ab037414a4898f790b3cba512f5,

title = "LEIS analysis of thin Cu films on Ru: an unexpected result on sputter intermixing",

author = "J.M. Sturm and {van de Kruijs}, {Robbert W.E.} and Parikshit Phadke and Marcelo Ackermann",

year = "2022",

month = may,

day = "19",

language = "English",

note = "LEIS Workshop 2022 ; Conference date: 19-05-2022 Through 19-05-2022",

}