Light Turning Mirrors in SiON Optical Waveguides for Hybrid Integration with CMOS Photo-detectors

F. Çivitci; G. Sengo; Markus Pollnau; A. Driessen; Hugo Hoekstra

Light Turning Mirrors in SiON Optical Waveguides for Hybrid Integration with CMOS Photo-detectors

F. Çivitci, G. Sengo, Markus Pollnau, A. Driessen, Hugo Hoekstra

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic

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Abstract

A new method is proposed for hybrid integration of SiON optical waveguides and standard CMOS photo-detectors based on anisotropic etching of 45° facets in a Si substrate. After removal of anisotropically etched Si structures in cladding SiO2, the fabricated total-internal-reflection mirrors can direct the output of the waveguides to photo-detectors placed on top of the chip. The metal-free fabrication process, designed to create these mirrors, is convenient for batch production. Fourier optics based simulations predict that the reflection efficiency of the mirrors is 68.5 %. The far field pattern obtained from the fabricated device is similar to the simulated one.

Original language	English
Title of host publication	Proceedings of the 2011 Annual Symposium of the IEEE Photonics Benelux Chapter
Place of Publication	Ghent, Belgium
Publisher	Ghent University
Pages	105-108
Number of pages	4
ISBN (Print)	978-90-76546-00-1
Publication status	Published - 1 Dec 2011
Event	16th Annual Symposium of the IEEE Photonics Benelux Chapter 2011 - Ghent, Belgium Duration: 1 Dec 2011 → 2 Dec 2011 Conference number: 16 http://www.photonics-benelux.org/symp11/

Publication series

Name
Publisher	Department of Information Technology, Ghent University

Conference

Conference	16th Annual Symposium of the IEEE Photonics Benelux Chapter 2011
Country/Territory	Belgium
City	Ghent
Period	1/12/11 → 2/12/11
Internet address	http://www.photonics-benelux.org/symp11/

Keywords

METIS-285009
EWI-21293
IR-79372

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@inproceedings{f846a40ae3904bb683c59f81b671f56d,

title = "Light Turning Mirrors in SiON Optical Waveguides for Hybrid Integration with CMOS Photo-detectors",

abstract = "A new method is proposed for hybrid integration of SiON optical waveguides and standard CMOS photo-detectors based on anisotropic etching of 45° facets in a Si substrate. After removal of anisotropically etched Si structures in cladding SiO2, the fabricated total-internal-reflection mirrors can direct the output of the waveguides to photo-detectors placed on top of the chip. The metal-free fabrication process, designed to create these mirrors, is convenient for batch production. Fourier optics based simulations predict that the reflection efficiency of the mirrors is 68.5 %. The far field pattern obtained from the fabricated device is similar to the simulated one.",

keywords = "METIS-285009, EWI-21293, IR-79372",

author = "F. {\c C}ivitci and G. Sengo and Markus Pollnau and A. Driessen and Hugo Hoekstra",

year = "2011",

month = dec,

day = "1",

language = "English",

isbn = "978-90-76546-00-1",

publisher = "Ghent University",

pages = "105--108",

booktitle = "Proceedings of the 2011 Annual Symposium of the IEEE Photonics Benelux Chapter",

address = "Belgium",

note = "16th Annual Symposium of the IEEE Photonics Benelux Chapter 2011 ; Conference date: 01-12-2011 Through 02-12-2011",

url = "http://www.photonics-benelux.org/symp11/",

}

Çivitci, F, Sengo, G, Pollnau, M, Driessen, A & Hoekstra, H 2011, Light Turning Mirrors in SiON Optical Waveguides for Hybrid Integration with CMOS Photo-detectors. in Proceedings of the 2011 Annual Symposium of the IEEE Photonics Benelux Chapter. Ghent University, Ghent, Belgium, pp. 105-108, 16th Annual Symposium of the IEEE Photonics Benelux Chapter 2011, Ghent, Belgium, 1/12/11.

Light Turning Mirrors in SiON Optical Waveguides for Hybrid Integration with CMOS Photo-detectors. / Çivitci, F.; Sengo, G.; Pollnau, Markus et al.
Proceedings of the 2011 Annual Symposium of the IEEE Photonics Benelux Chapter. Ghent, Belgium: Ghent University, 2011. p. 105-108.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic

TY - GEN

T1 - Light Turning Mirrors in SiON Optical Waveguides for Hybrid Integration with CMOS Photo-detectors

AU - Çivitci, F.

AU - Sengo, G.

AU - Pollnau, Markus

AU - Driessen, A.

AU - Hoekstra, Hugo

N1 - Conference code: 16

PY - 2011/12/1

Y1 - 2011/12/1

N2 - A new method is proposed for hybrid integration of SiON optical waveguides and standard CMOS photo-detectors based on anisotropic etching of 45° facets in a Si substrate. After removal of anisotropically etched Si structures in cladding SiO2, the fabricated total-internal-reflection mirrors can direct the output of the waveguides to photo-detectors placed on top of the chip. The metal-free fabrication process, designed to create these mirrors, is convenient for batch production. Fourier optics based simulations predict that the reflection efficiency of the mirrors is 68.5 %. The far field pattern obtained from the fabricated device is similar to the simulated one.

AB - A new method is proposed for hybrid integration of SiON optical waveguides and standard CMOS photo-detectors based on anisotropic etching of 45° facets in a Si substrate. After removal of anisotropically etched Si structures in cladding SiO2, the fabricated total-internal-reflection mirrors can direct the output of the waveguides to photo-detectors placed on top of the chip. The metal-free fabrication process, designed to create these mirrors, is convenient for batch production. Fourier optics based simulations predict that the reflection efficiency of the mirrors is 68.5 %. The far field pattern obtained from the fabricated device is similar to the simulated one.

KW - METIS-285009

KW - EWI-21293

KW - IR-79372

M3 - Conference contribution

SN - 978-90-76546-00-1

SP - 105

EP - 108

BT - Proceedings of the 2011 Annual Symposium of the IEEE Photonics Benelux Chapter

PB - Ghent University

CY - Ghent, Belgium

T2 - 16th Annual Symposium of the IEEE Photonics Benelux Chapter 2011

Y2 - 1 December 2011 through 2 December 2011

ER -

Light Turning Mirrors in SiON Optical Waveguides for Hybrid Integration with CMOS Photo-detectors

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