Light Turning Mirrors in SiON Optical Waveguides for Hybrid Integration with CMOS Photo-detectors

F. Çivitci, G. Sengo, Markus Pollnau, A. Driessen, Hugo Hoekstra

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

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    Abstract

    A new method is proposed for hybrid integration of SiON optical waveguides and standard CMOS photo-detectors based on anisotropic etching of 45° facets in a Si substrate. After removal of anisotropically etched Si structures in cladding SiO2, the fabricated total-internal-reflection mirrors can direct the output of the waveguides to photo-detectors placed on top of the chip. The metal-free fabrication process, designed to create these mirrors, is convenient for batch production. Fourier optics based simulations predict that the reflection efficiency of the mirrors is 68.5 %. The far field pattern obtained from the fabricated device is similar to the simulated one.
    Original languageEnglish
    Title of host publicationProceedings of the 2011 Annual Symposium of the IEEE Photonics Benelux Chapter
    Place of PublicationGhent, Belgium
    PublisherDepartment of Information Technology, Ghent University
    Pages105-108
    Number of pages4
    ISBN (Print)978-90-76546-00-1
    Publication statusPublished - 1 Dec 2011
    Event16th Annual Symposium of the IEEE Photonics Benelux Chapter 2011 - Ghent, Belgium
    Duration: 1 Dec 20112 Dec 2011
    Conference number: 16
    http://www.photonics-benelux.org/symp11/

    Publication series

    Name
    PublisherDepartment of Information Technology, Ghent University

    Conference

    Conference16th Annual Symposium of the IEEE Photonics Benelux Chapter 2011
    CountryBelgium
    CityGhent
    Period1/12/112/12/11
    Internet address

    Keywords

    • METIS-285009
    • EWI-21293
    • IR-79372

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