Linear-time-varying feedforward control for position-dependent flexible structures

Fatemeh Sharifi; Hans Zwart; Marcel Heertjes; Nikolaos Kontaras

doi:10.23919/ECC51009.2020.9143846

Linear-time-varying feedforward control for position-dependent flexible structures

Fatemeh Sharifi, Hans Zwart, Marcel Heertjes, Nikolaos Kontaras

Hybrid Systems

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

1 Citation (Scopus)

316 Downloads (Pure)

Abstract

High performance motion systems in the semiconductor industry can achieve higher tracking accuracy when the structural dynamics of the system are taken into account. This work proposes an LTV feedforward control scheme which is based on the approximation of the system dynamics at low frequencies. The plant approximation contains both the low frequency contribution and resonance dynamics of the dominant modes. As an example of a flexible structure, the damped Euler-Bernoulli beam is investigated with considering the stable inversion of the approximated plant for feedforward control design. The results show a remarkable increase in positioning accuracy of the system being the consequence of the presence of feedforward control forces even when the reference setpoint accelerations equal zero.

Original language	English
Title of host publication	European Control Conference 2020, ECC 2020
Publisher	IEEE
Pages	1409-1414
Number of pages	6
ISBN (Electronic)	9783907144015
DOIs	https://doi.org/10.23919/ECC51009.2020.9143846
Publication status	Published - 20 Jul 2020
Event	18th European Control Conference, ECC 2020 - Virtual event, Saint Petersburg, Russian Federation Duration: 12 May 2020 → 15 May 2020 Conference number: 18 https://ecc20.eu/

Conference

Conference	18th European Control Conference, ECC 2020
Abbreviated title	ECC 2020
Country/Territory	Russian Federation
City	Saint Petersburg
Period	12/05/20 → 15/05/20
Internet address	https://ecc20.eu/

Keywords

2021 OA procedure

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10.23919/ECC51009.2020.9143846

ArticleFinal published version, 642 KBLicence: Taverne

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@inproceedings{d493ce3049ac4238812d6de48816c6dd,

title = "Linear-time-varying feedforward control for position-dependent flexible structures",

abstract = "High performance motion systems in the semiconductor industry can achieve higher tracking accuracy when the structural dynamics of the system are taken into account. This work proposes an LTV feedforward control scheme which is based on the approximation of the system dynamics at low frequencies. The plant approximation contains both the low frequency contribution and resonance dynamics of the dominant modes. As an example of a flexible structure, the damped Euler-Bernoulli beam is investigated with considering the stable inversion of the approximated plant for feedforward control design. The results show a remarkable increase in positioning accuracy of the system being the consequence of the presence of feedforward control forces even when the reference setpoint accelerations equal zero.",

keywords = "2021 OA procedure",

author = "Fatemeh Sharifi and Hans Zwart and Marcel Heertjes and Nikolaos Kontaras",

year = "2020",

month = jul,

day = "20",

doi = "10.23919/ECC51009.2020.9143846",

language = "English",

pages = "1409--1414",

booktitle = "European Control Conference 2020, ECC 2020",

publisher = "IEEE",

address = "United States",

note = "18th European Control Conference, ECC 2020, ECC 2020 ; Conference date: 12-05-2020 Through 15-05-2020",

url = "https://ecc20.eu/",

}

TY - GEN

T1 - Linear-time-varying feedforward control for position-dependent flexible structures

AU - Sharifi, Fatemeh

AU - Zwart, Hans

AU - Heertjes, Marcel

AU - Kontaras, Nikolaos

N1 - Conference code: 18

PY - 2020/7/20

Y1 - 2020/7/20

N2 - High performance motion systems in the semiconductor industry can achieve higher tracking accuracy when the structural dynamics of the system are taken into account. This work proposes an LTV feedforward control scheme which is based on the approximation of the system dynamics at low frequencies. The plant approximation contains both the low frequency contribution and resonance dynamics of the dominant modes. As an example of a flexible structure, the damped Euler-Bernoulli beam is investigated with considering the stable inversion of the approximated plant for feedforward control design. The results show a remarkable increase in positioning accuracy of the system being the consequence of the presence of feedforward control forces even when the reference setpoint accelerations equal zero.

AB - High performance motion systems in the semiconductor industry can achieve higher tracking accuracy when the structural dynamics of the system are taken into account. This work proposes an LTV feedforward control scheme which is based on the approximation of the system dynamics at low frequencies. The plant approximation contains both the low frequency contribution and resonance dynamics of the dominant modes. As an example of a flexible structure, the damped Euler-Bernoulli beam is investigated with considering the stable inversion of the approximated plant for feedforward control design. The results show a remarkable increase in positioning accuracy of the system being the consequence of the presence of feedforward control forces even when the reference setpoint accelerations equal zero.

KW - 2021 OA procedure

UR - http://www.scopus.com/inward/record.url?scp=85090119102&partnerID=8YFLogxK

U2 - 10.23919/ECC51009.2020.9143846

DO - 10.23919/ECC51009.2020.9143846

M3 - Conference contribution

AN - SCOPUS:85090119102

SP - 1409

EP - 1414

BT - European Control Conference 2020, ECC 2020

PB - IEEE

T2 - 18th European Control Conference, ECC 2020

Y2 - 12 May 2020 through 15 May 2020

ER -

Linear-time-varying feedforward control for position-dependent flexible structures

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