Listening to MEMS: An acoustic vibrometer

Doekle Reinder Yntema; J. Haneveld; Johannes Bernardus Charles Engelen; Robert Anton Brookhuis; Remco G.P. Sanders; Remco J. Wiegerink; Michael Curt Elwenspoek

doi:10.1109/MEMSYS.2010.5442319

Listening to MEMS: An acoustic vibrometer

Doekle Reinder Yntema, J. Haneveld, Johannes Bernardus Charles Engelen, Robert Anton Brookhuis, Remco G.P. Sanders, Remco J. Wiegerink, Michael Curt Elwenspoek

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

1 Citation (Scopus)

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Abstract

new way to characterize vibrating MEMS devices is presented. Using an acoustic particle velocity sensor the coupled sound field is measured, which is a measure for the movement of the MEMS device. We present several possible applications of this measurement method. It can be used as a read-out system for a mass flow sensor, and for characterization of in- and out-of-plane movements of MEMS devices. The method is an interesting alternative to laser scanning vibrometry due to its small size and low complexity; furthermore, it allows the user to `listen' directly to MEMS devices.

Original language	English
Title of host publication	IEEE 23rd International Conference on Micro Electro Mechanical Systems (MEMS 2010)
Publisher	IEEE
Pages	1-4
Number of pages	4
ISBN (Electronic)	978-1-4244-5763-2
ISBN (Print)	978-1-4244-5763-2
DOIs	https://doi.org/10.1109/MEMSYS.2010.5442319
Publication status	Published - 24 Jan 2010
Event	23rd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2010 - Wanchai, Hong Kong, Hong Kong Duration: 24 Jan 2010 → 28 Jan 2010 Conference number: 23

Conference

Conference	23rd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2010
Abbreviated title	MEMS
Country/Territory	Hong Kong
City	Hong Kong
Period	24/01/10 → 28/01/10

Keywords

METIS-270878
Acoustic devices
IR-72271
EWI-18076
Microsensors
readout electronics
flow measurement
Vibration measurement

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10.1109/MEMSYS.2010.5442319

Listening_to_MEMS_-_Doekle_-_jan_2010

Cite this

@inproceedings{fa07ad1f3452494e926420ebaefe1a8b,

title = "Listening to MEMS: An acoustic vibrometer",

abstract = "new way to characterize vibrating MEMS devices is presented. Using an acoustic particle velocity sensor the coupled sound field is measured, which is a measure for the movement of the MEMS device. We present several possible applications of this measurement method. It can be used as a read-out system for a mass flow sensor, and for characterization of in- and out-of-plane movements of MEMS devices. The method is an interesting alternative to laser scanning vibrometry due to its small size and low complexity; furthermore, it allows the user to `listen' directly to MEMS devices.",

keywords = "METIS-270878, Acoustic devices, IR-72271, EWI-18076, Microsensors, readout electronics, flow measurement, Vibration measurement",

author = "Yntema, {Doekle Reinder} and J. Haneveld and Engelen, {Johannes Bernardus Charles} and Brookhuis, {Robert Anton} and Sanders, {Remco G.P.} and Wiegerink, {Remco J.} and Elwenspoek, {Michael Curt}",

year = "2010",

month = jan,

day = "24",

doi = "10.1109/MEMSYS.2010.5442319",

language = "English",

isbn = "978-1-4244-5763-2",

pages = "1--4",

booktitle = "IEEE 23rd International Conference on Micro Electro Mechanical Systems (MEMS 2010)",

publisher = "IEEE",

address = "United States",

note = "23rd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2010, MEMS ; Conference date: 24-01-2010 Through 28-01-2010",

}

Yntema, DR, Haneveld, J, Engelen, JBC, Brookhuis, RA, Sanders, RGP , Wiegerink, RJ & Elwenspoek, MC 2010, Listening to MEMS: An acoustic vibrometer. in IEEE 23rd International Conference on Micro Electro Mechanical Systems (MEMS 2010). IEEE, pp. 1-4, 23rd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2010, Hong Kong, Hong Kong, 24/01/10. https://doi.org/10.1109/MEMSYS.2010.5442319

TY - GEN

T1 - Listening to MEMS

T2 - 23rd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2010

AU - Yntema, Doekle Reinder

AU - Haneveld, J.

AU - Engelen, Johannes Bernardus Charles

AU - Brookhuis, Robert Anton

AU - Sanders, Remco G.P.

AU - Wiegerink, Remco J.

AU - Elwenspoek, Michael Curt

N1 - Conference code: 23

PY - 2010/1/24

Y1 - 2010/1/24

N2 - new way to characterize vibrating MEMS devices is presented. Using an acoustic particle velocity sensor the coupled sound field is measured, which is a measure for the movement of the MEMS device. We present several possible applications of this measurement method. It can be used as a read-out system for a mass flow sensor, and for characterization of in- and out-of-plane movements of MEMS devices. The method is an interesting alternative to laser scanning vibrometry due to its small size and low complexity; furthermore, it allows the user to `listen' directly to MEMS devices.

AB - new way to characterize vibrating MEMS devices is presented. Using an acoustic particle velocity sensor the coupled sound field is measured, which is a measure for the movement of the MEMS device. We present several possible applications of this measurement method. It can be used as a read-out system for a mass flow sensor, and for characterization of in- and out-of-plane movements of MEMS devices. The method is an interesting alternative to laser scanning vibrometry due to its small size and low complexity; furthermore, it allows the user to `listen' directly to MEMS devices.

KW - METIS-270878

KW - Acoustic devices

KW - IR-72271

KW - EWI-18076

KW - Microsensors

KW - readout electronics

KW - flow measurement

KW - Vibration measurement

U2 - 10.1109/MEMSYS.2010.5442319

DO - 10.1109/MEMSYS.2010.5442319

M3 - Conference contribution

SN - 978-1-4244-5763-2

SP - 1

EP - 4

BT - IEEE 23rd International Conference on Micro Electro Mechanical Systems (MEMS 2010)

PB - IEEE

Y2 - 24 January 2010 through 28 January 2010

ER -

Listening to MEMS: An acoustic vibrometer

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Conference

Keywords

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