Listening to MEMS: An acoustic vibrometer

Doekle Reinder Yntema, J. Haneveld, Johannes Bernardus Charles Engelen, Robert Anton Brookhuis, Remco G.P. Sanders, Remco J. Wiegerink, Michael Curt Elwenspoek

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    new way to characterize vibrating MEMS devices is presented. Using an acoustic particle velocity sensor the coupled sound field is measured, which is a measure for the movement of the MEMS device. We present several possible applications of this measurement method. It can be used as a read-out system for a mass flow sensor, and for characterization of in- and out-of-plane movements of MEMS devices. The method is an interesting alternative to laser scanning vibrometry due to its small size and low complexity; furthermore, it allows the user to `listen' directly to MEMS devices.
    Original languageEnglish
    Title of host publicationIEEE 23rd International Conference on Micro Electro Mechanical Systems (MEMS 2010)
    Number of pages4
    ISBN (Electronic)978-1-4244-5763-2
    ISBN (Print)978-1-4244-5763-2
    Publication statusPublished - 24 Jan 2010
    Event23rd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2010 - Wanchai, Hong Kong, Hong Kong
    Duration: 24 Jan 201028 Jan 2010
    Conference number: 23


    Conference23rd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2010
    Abbreviated titleMEMS
    Country/TerritoryHong Kong
    CityHong Kong


    • METIS-270878
    • Acoustic devices
    • IR-72271
    • EWI-18076
    • Microsensors
    • readout electronics
    • flow measurement
    • Vibration measurement

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