Listening to MEMS: An acoustic vibrometer

Doekle Reinder Yntema, J. Haneveld, Johannes Bernardus Charles Engelen, Robert Anton Brookhuis, Remco G.P. Sanders, Remco J. Wiegerink, Michael Curt Elwenspoek

    Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

    1 Citation (Scopus)
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