Lithographic apparatus and device manufacturing method

F. Auer (Inventor), F.A.C. Spanjers (Inventor), J. Holterman (Inventor), M.P. Koster (Inventor), Theodorus J.A. de Vries (Inventor)

Research output: Patent

Original languageUndefined
Patent numberEP1225482
Priority date1/01/02
Publication statusSubmitted - 1 Jan 2002

Keywords

  • METIS-224449

Cite this

Auer, F., Spanjers, F. A. C., Holterman, J., Koster, M. P., & de Vries, T. J. A. (2002). Lithographic apparatus and device manufacturing method. Manuscript submitted for publication. (Patent No. EP1225482).