Lithographic apparatus and device manufacturing method

F. Auer (Inventor), F.A.C. Spanjers (Inventor), J. Holterman (Inventor), M.P. Koster (Inventor), Theodorus J.A. de Vries (Inventor)

Research output: Patent › Professional

Auer, F., Spanjers, F. A. C., Holterman, J., Koster, M. P., & de Vries, T. J. A. (2002). Lithographic apparatus and device manufacturing method. Manuscript submitted for publication. (Patent No. EP1225482).

Auer, F. (Inventor) ; Spanjers, F.A.C. (Inventor) ; Holterman, J. (Inventor) ; Koster, M.P. (Inventor) ; de Vries, Theodorus J.A. (Inventor). / Lithographic apparatus and device manufacturing method. Patent No.: EP1225482.

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title = "Lithographic apparatus and device manufacturing method",

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author = "F. Auer and F.A.C. Spanjers and J. Holterman and M.P. Koster and {de Vries}, {Theodorus J.A.}",

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Auer, F, Spanjers, FAC, Holterman, J, Koster, MP & de Vries, TJA 2002, Lithographic apparatus and device manufacturing method, Patent No. EP1225482.

Lithographic apparatus and device manufacturing method. / Auer, F. (Inventor); Spanjers, F.A.C. (Inventor); Holterman, J. (Inventor); Koster, M.P. (Inventor); de Vries, Theodorus J.A. (Inventor).

Patent No.: EP1225482.

Research output: Patent › Professional

TY - PAT

T1 - Lithographic apparatus and device manufacturing method

AU - Auer, F.

AU - Spanjers, F.A.C.

AU - Holterman, J.

AU - Koster, M.P.

AU - de Vries, Theodorus J.A.

PY - 2002/1/1

Y1 - 2002/1/1

KW - METIS-224449

M3 - Patent

M1 - EP1225482

ER -

Auer F, Spanjers FAC, Holterman J, Koster MP, de Vries TJA, inventors. Lithographic apparatus and device manufacturing method. EP1225482. 2002 Jan 1.