Lithographic apparatus and device manufacturing method

F. Auer (Inventor), F.A.C. Spanjers (Inventor), J. Holterman (Inventor), M.P. Koster (Inventor), Theodorus J.A. de Vries (Inventor)

Research output: Patent

Keywords

@misc{6c28de635c394934b03fbf13484a405f,

title = "Lithographic apparatus and device manufacturing method",

keywords = "METIS-224449",

author = "F. Auer and F.A.C. Spanjers and J. Holterman and M.P. Koster and \{de Vries\}, \{Theodorus J.A.\}",

year = "2002",

month = jan,

day = "1",

language = "Undefined",

type = "Patent",

note = "EP1225482",

}