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Lithographic apparatus and device manufacturing method

  • F. Auer (Inventor)
  • , F.A.C. Spanjers (Inventor)
  • , J. Holterman (Inventor)
  • , M.P. Koster (Inventor)
  • , Theodorus J.A. de Vries (Inventor)

Research output: Patent

Original languageUndefined
Patent numberEP1225482
Priority date1/01/02
Publication statusSubmitted - 1 Jan 2002

UN SDGs

This output contributes to the following UN Sustainable Development Goals (SDGs)

  1. SDG 9 - Industry, Innovation, and Infrastructure
    SDG 9 Industry, Innovation, and Infrastructure

Keywords

  • METIS-224449

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