Lithographic tools for inorganic materials

P.J. de Veen, P.M. te Riele, Sajid Khan, O. Yildirim, Ole Göbel, Evert Pieter Houwman, Johan E. ten Elshof, Augustinus J.H.M. Rijnders, David H.A. Blank

Research output: Contribution to conferencePoster

Original languageUndefined
Pages-
Publication statusPublished - 11 Sep 2007
EventMESA+ Day 2007 - Cinestar, Enschede, Netherlands
Duration: 11 Sep 200711 Sep 2007

Conference

ConferenceMESA+ Day 2007
CountryNetherlands
CityEnschede
Period11/09/0711/09/07
Other(MESA+ Dag/Meeting)

Keywords

  • METIS-242693

Cite this

de Veen, P. J., te Riele, P. M., Khan, S., Yildirim, O., Göbel, O., Houwman, E. P., ... Blank, D. H. A. (2007). Lithographic tools for inorganic materials. -. Poster session presented at MESA+ Day 2007, Enschede, Netherlands.
de Veen, P.J. ; te Riele, P.M. ; Khan, Sajid ; Yildirim, O. ; Göbel, Ole ; Houwman, Evert Pieter ; ten Elshof, Johan E. ; Rijnders, Augustinus J.H.M. ; Blank, David H.A. / Lithographic tools for inorganic materials. Poster session presented at MESA+ Day 2007, Enschede, Netherlands.
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title = "Lithographic tools for inorganic materials",
keywords = "METIS-242693",
author = "{de Veen}, P.J. and {te Riele}, P.M. and Sajid Khan and O. Yildirim and Ole G{\"o}bel and Houwman, {Evert Pieter} and {ten Elshof}, {Johan E.} and Rijnders, {Augustinus J.H.M.} and Blank, {David H.A.}",
year = "2007",
month = "9",
day = "11",
language = "Undefined",
pages = "--",
note = "null ; Conference date: 11-09-2007 Through 11-09-2007",

}

de Veen, PJ, te Riele, PM, Khan, S, Yildirim, O, Göbel, O, Houwman, EP, ten Elshof, JE, Rijnders, AJHM & Blank, DHA 2007, 'Lithographic tools for inorganic materials' MESA+ Day 2007, Enschede, Netherlands, 11/09/07 - 11/09/07, pp. -.

Lithographic tools for inorganic materials. / de Veen, P.J.; te Riele, P.M.; Khan, Sajid; Yildirim, O.; Göbel, Ole; Houwman, Evert Pieter; ten Elshof, Johan E.; Rijnders, Augustinus J.H.M.; Blank, David H.A.

2007. - Poster session presented at MESA+ Day 2007, Enschede, Netherlands.

Research output: Contribution to conferencePoster

TY - CONF

T1 - Lithographic tools for inorganic materials

AU - de Veen, P.J.

AU - te Riele, P.M.

AU - Khan, Sajid

AU - Yildirim, O.

AU - Göbel, Ole

AU - Houwman, Evert Pieter

AU - ten Elshof, Johan E.

AU - Rijnders, Augustinus J.H.M.

AU - Blank, David H.A.

PY - 2007/9/11

Y1 - 2007/9/11

KW - METIS-242693

M3 - Poster

SP - -

ER -

de Veen PJ, te Riele PM, Khan S, Yildirim O, Göbel O, Houwman EP et al. Lithographic tools for inorganic materials. 2007. Poster session presented at MESA+ Day 2007, Enschede, Netherlands.