Lithographic tools for inorganic materials

P.J. de Veen; P.M. te Riele; Sajid Khan; O. Yildirim; Ole Göbel; Evert Pieter Houwman; Johan E. ten Elshof; Augustinus J.H.M. Rijnders; David H.A. Blank

Lithographic tools for inorganic materials

P.J. de Veen, P.M. te Riele, Sajid Khan, O. Yildirim, Ole Göbel, Evert Pieter Houwman, Johan E. ten Elshof, Augustinus J.H.M. Rijnders, David H.A. Blank

Inorganic Materials Science

Research output: Contribution to conference › Poster › Other research output

Original language	Undefined
Pages	-
Publication status	Published - 11 Sept 2007
Event	MESA+ Day 2007 - Cinestar, Enschede, Netherlands Duration: 11 Sept 2007 → 11 Sept 2007

Conference

Conference	MESA+ Day 2007
Country/Territory	Netherlands
City	Enschede
Period	11/09/07 → 11/09/07
Other	(MESA+ Dag/Meeting)

Keywords

METIS-242693

Cite this

@conference{5b3d0233aaae4d539a50238300e974e4,

title = "Lithographic tools for inorganic materials",

keywords = "METIS-242693",

author = "{de Veen}, P.J. and {te Riele}, P.M. and Sajid Khan and O. Yildirim and Ole G{\"o}bel and Houwman, {Evert Pieter} and {ten Elshof}, {Johan E.} and Rijnders, {Augustinus J.H.M.} and Blank, {David H.A.}",

year = "2007",

month = sep,

day = "11",

language = "Undefined",

pages = "--",

note = "MESA+ Day 2007 ; Conference date: 11-09-2007 Through 11-09-2007",

}

TY - CONF

T1 - Lithographic tools for inorganic materials

AU - de Veen, P.J.

AU - te Riele, P.M.

AU - Khan, Sajid

AU - Yildirim, O.

AU - Göbel, Ole

AU - Houwman, Evert Pieter

AU - ten Elshof, Johan E.

AU - Rijnders, Augustinus J.H.M.

AU - Blank, David H.A.

PY - 2007/9/11

Y1 - 2007/9/11

KW - METIS-242693

M3 - Poster

SP - -

T2 - MESA+ Day 2007

Y2 - 11 September 2007 through 11 September 2007

ER -