Lithographic tools for inorganic materials

P.J. de Veen, P.M. te Riele, Sajid Khan, O. Yildirim, Ole Göbel, Evert Pieter Houwman, Johan E. ten Elshof, Augustinus J.H.M. Rijnders, David H.A. Blank

Research output: Contribution to conferencePoster

Original languageUndefined
Pages-
Publication statusPublished - 11 Sep 2007
EventMESA+ Day 2007 - Cinestar, Enschede, Netherlands
Duration: 11 Sep 200711 Sep 2007

Conference

ConferenceMESA+ Day 2007
CountryNetherlands
CityEnschede
Period11/09/0711/09/07
Other(MESA+ Dag/Meeting)

Keywords

  • METIS-242693

Cite this

de Veen, P. J., te Riele, P. M., Khan, S., Yildirim, O., Göbel, O., Houwman, E. P., ... Blank, D. H. A. (2007). Lithographic tools for inorganic materials. -. Poster session presented at MESA+ Day 2007, Enschede, Netherlands.