Lithography and reactive ion etching optimization towards low-loss TiO2 waveguides

Research output: Contribution to conferencePoster

Original languageEnglish
Publication statusPublished - 22 Nov 2019
Event24th Annual Symposium of the IEEE Photonics Benelux Chapter 2019
- VU Amsterdam, Amsterdam, Netherlands
Duration: 21 Nov 201922 Nov 2019
Conference number: 24
https://www.aanmelder.nl/ieee-benelux-2019

Conference

Conference24th Annual Symposium of the IEEE Photonics Benelux Chapter 2019
CountryNetherlands
CityAmsterdam
Period21/11/1922/11/19
Internet address

Cite this

Hegeman, I., & García Blanco, S. M. (2019). Lithography and reactive ion etching optimization towards low-loss TiO2 waveguides. Poster session presented at 24th Annual Symposium of the IEEE Photonics Benelux Chapter 2019
, Amsterdam, Netherlands.