Lithography and reactive ion etching optimization towards low-loss TiO2 waveguides

Research output: Contribution to conference › Poster › Academic

Original language	English
Publication status	Published - 22 Nov 2019
Event	24th Annual Symposium of the IEEE Photonics Benelux Chapter 2019 - VU Amsterdam, Amsterdam, Netherlands Duration: 21 Nov 2019 → 22 Nov 2019 Conference number: 24 https://www.aanmelder.nl/ieee-benelux-2019

Conference	24th Annual Symposium of the IEEE Photonics Benelux Chapter 2019
Country/Territory	Netherlands
City	Amsterdam
Period	21/11/19 → 22/11/19
Internet address	https://www.aanmelder.nl/ieee-benelux-2019

Cite this

@conference{3a5f103b87664110b50c575dea1c46b0,

title = "Lithography and reactive ion etching optimization towards low-loss TiO2 waveguides",

author = "Ivo Hegeman and \{Garc{\'i}a Blanco\}, S.M.",

year = "2019",

month = nov,

day = "22",

language = "English",

note = "24th Annual Symposium of the IEEE Photonics Benelux Chapter 2019<br/> ; Conference date: 21-11-2019 Through 22-11-2019",

url = "https://www.aanmelder.nl/ieee-benelux-2019",

}