Loading effects on silane reduced selective Tungsten demonstrated with in situ growth rate measurements

J. Holleman, A. Hasper, C.R. Kleijn

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

    Original languageEnglish
    Title of host publicationConference Proceedings ULSI-VII
    Place of PublicationDallas
    PublisherMaterials Research Society
    Number of pages0
    Publication statusPublished - 26 Oct 1992

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