Loading effects on silane reduced selective Tungsten demonstrated with in situ growth rate measurements

J. Holleman, A. Hasper, C.R. Kleijn

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

    Original languageEnglish
    Title of host publicationConference Proceedings ULSI-VII
    Place of PublicationDallas
    PublisherMaterials Research Society
    Pages241-248
    Number of pages0
    Publication statusPublished - 26 Oct 1992

    Cite this

    Holleman, J., Hasper, A., & Kleijn, C. R. (1992). Loading effects on silane reduced selective Tungsten demonstrated with in situ growth rate measurements. In Conference Proceedings ULSI-VII (pp. 241-248). Dallas: Materials Research Society.