Loading effects on silane reduced selective Tungsten demonstrated with in situ growth rate measurements

J. Holleman, A. Hasper, C.R. Kleijn

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

Original language	English
Title of host publication	Conference Proceedings ULSI-VII
Place of Publication	Dallas
Publisher	Materials Research Society
Pages	241-248
Number of pages	0
Publication status	Published - 26 Oct 1992

Cite this

@inproceedings{c8330a7138c341b6a7207cd86d13cea6,

title = "Loading effects on silane reduced selective Tungsten demonstrated with in situ growth rate measurements",

author = "J. Holleman and A. Hasper and C.R. Kleijn",

year = "1992",

month = oct,

day = "26",

language = "English",

pages = "241--248",

booktitle = "Conference Proceedings ULSI-VII",

publisher = "Materials Research Society",

address = "United States",

}