Local deposition and patterning of catalytic thin films in microsystems

Elizaveta Vereshchagina, Olesya Bliznyuk, Roald M. Tiggelaar, Karin J. Altena-Schildkamp, Johannes G.E. Gardeniers

Research output: Contribution to journalArticleAcademicpeer-review

3 Citations (Scopus)


The local deposition of catalysts is desired in a wide range of catalytic microsystems (microreactors and sensors). In this study, we investigate technologies enabling deposition and patterning of catalyst thin films in a manner compatible with standard micromachining processes. We evaluate and compare deposition techniques based on a combination of a self-assembly, soft-lithography and conventional micromachining. Platinum (Pt) and palladium (Pd) were used as model catalysts, both as a sputtered thin film and as nanoparticles supported on γ-alumina. The thin films were characterized and tested in terms of their catalytic activity based on CO chemisorption measurements, stability and reproducibility
Original languageEnglish
Article number045023
Number of pages11
JournalJournal of micromechanics and microengineering
Issue number4
Publication statusPublished - 2012


  • Physical chemistry
  • Produktie- en procestechnieken


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