TY - JOUR
T1 - Local deposition and patterning of catalytic thin films in microsystems
AU - Vereshchagina, Elizaveta
AU - Bliznyuk, Olesya
AU - Tiggelaar, Roald M.
AU - Altena-Schildkamp, Karin J.
AU - Gardeniers, Johannes G.E.
PY - 2012
Y1 - 2012
N2 - The local deposition of catalysts is desired in a wide range of catalytic microsystems (microreactors and sensors). In this study, we investigate technologies enabling deposition and patterning of catalyst thin films in a manner compatible with standard micromachining processes. We evaluate and compare deposition techniques based on a combination of a self-assembly, soft-lithography and conventional micromachining. Platinum (Pt) and palladium (Pd) were used as model catalysts, both as a sputtered thin film and as nanoparticles supported on γ-alumina. The thin films were characterized and tested in terms of their catalytic activity based on CO chemisorption measurements, stability and reproducibility
AB - The local deposition of catalysts is desired in a wide range of catalytic microsystems (microreactors and sensors). In this study, we investigate technologies enabling deposition and patterning of catalyst thin films in a manner compatible with standard micromachining processes. We evaluate and compare deposition techniques based on a combination of a self-assembly, soft-lithography and conventional micromachining. Platinum (Pt) and palladium (Pd) were used as model catalysts, both as a sputtered thin film and as nanoparticles supported on γ-alumina. The thin films were characterized and tested in terms of their catalytic activity based on CO chemisorption measurements, stability and reproducibility
KW - Physical chemistry
KW - Produktie- en procestechnieken
U2 - 10.1088/0960-1317/22/4/045023
DO - 10.1088/0960-1317/22/4/045023
M3 - Article
SN - 0960-1317
VL - 22
JO - Journal of micromechanics and microengineering
JF - Journal of micromechanics and microengineering
IS - 4
M1 - 045023
ER -
