Local deposition and patterning of catalytic thin films in microsystems

E. Vereshchagina, O. Bliznyuk, Roald M. Tiggelaar, Karin J. Altena-Schildkamp, Johannes G.E. Gardeniers

Research output: Contribution to journalArticleAcademicpeer-review

3 Citations (Scopus)


The local deposition of catalysts is desired in a wide range of catalytic microsystems (microreactors and sensors). In this study, we investigate technologies enabling deposition and patterning of catalyst thin films in a manner compatible with standard micromachining processes. We evaluate and compare deposition techniques based on a combination of a self-assembly, soft-lithography and conventional micromachining. Platinum (Pt) and palladium (Pd) were used as model catalysts, both as a sputtered thin film and as nanoparticles supported on γ-alumina. The thin films were characterized and tested in terms of their catalytic activity based on CO chemisorption measurements, stability and reproducibility
Original languageEnglish
Article number045023
Pages (from-to)-
Number of pages11
JournalJournal of micromechanics and microengineering
Issue number4
Publication statusPublished - 2012


  • IR-81947
  • METIS-287180
  • Physical chemistryProduktie- en procestechnieken


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