Local Thermal Activation of tert-Butyl Acrylate Based Polymer Films: Toward AFM Based Nanoscale Thermal Chemical Lithography

Joost Duvigneau, S. Cornelissen, N. Bardají Valls, Holger Schönherr, Gyula J. Vancso

Research output: Contribution to conferencePosterOther research output

Original languageEnglish
Pages-
Publication statusPublished - 5 Nov 2009
EventNetherlands MicroNanoConference 2009 - Delft, Netherlands
Duration: 5 Nov 20096 Nov 2009

Conference

ConferenceNetherlands MicroNanoConference 2009
Country/TerritoryNetherlands
CityDelft
Period5/11/096/11/09

Keywords

  • METIS-260115

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