Long pulse ArF and F2 excimer lasers

P.J.M. Peters, L. Feenstra, Hubertus M.J. Bastiaens

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

4 Citations (Scopus)
Original languageEnglish
Title of host publicationXIII International Symposium on Gas Flow and Chemical Lasers and High-Power Laser
EditorsA. Lapucci, M. Ciofini
PublisherSPIE - The International Society for Optical Engineering
Pages338-347
Number of pages10
ISBN (Print)0-8194-3847-2
DOIs
Publication statusPublished - 18 Sep 2001
EventXIII International Symposium on Gas Flow and Chemical Lasers and High-Power Laser, Florence, Italy: XIII International Symposium on Gas Flow and Chemical Lasers and High-Power Laser -
Duration: 18 Sep 200022 Sep 2000

Publication series

NameProceedings of SPIE
PublisherSPIE
Volume4184
ISSN (Print)0277-786X

Conference

ConferenceXIII International Symposium on Gas Flow and Chemical Lasers and High-Power Laser, Florence, Italy
Period18/09/0022/09/00

Keywords

  • METIS-204543
  • IR-96099

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