Long pulse ArF and F2 excimer lasers

P.J.M. Peters; L. Feenstra; Hubertus M.J. Bastiaens

doi:10.1117/12.414085

Long pulse ArF and F2 excimer lasers

P.J.M. Peters, L. Feenstra, Hubertus M.J. Bastiaens

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

9 Citations (Scopus)

4 Downloads (Pure)

Original language	English
Title of host publication	XIII International Symposium on Gas Flow and Chemical Lasers and High-Power Laser
Editors	A. Lapucci, M. Ciofini
Publisher	SPIE
Pages	338-347
Number of pages	10
ISBN (Print)	0-8194-3847-2
DOIs	https://doi.org/10.1117/12.414085
Publication status	Published - 18 Sept 2001
Event	XIII International Symposium on Gas Flow and Chemical Lasers and High-Power Laser, Florence, Italy: XIII International Symposium on Gas Flow and Chemical Lasers and High-Power Laser - Duration: 18 Sept 2000 → 22 Sept 2000

Publication series

Name	Proceedings of SPIE
Publisher	SPIE
Volume	4184
ISSN (Print)	0277-786X

Conference

Conference	XIII International Symposium on Gas Flow and Chemical Lasers and High-Power Laser, Florence, Italy
Period	18/09/00 → 22/09/00

Keywords

METIS-204543
IR-96099

Access to Document

10.1117/12.414085

Cite this

@inproceedings{b95d14de98ff45d58246601c69b550fb,

title = "Long pulse ArF and F2 excimer lasers",

keywords = "METIS-204543, IR-96099",

author = "P.J.M. Peters and L. Feenstra and Bastiaens, \{Hubertus M.J.\}",

year = "2001",

month = sep,

day = "18",

doi = "10.1117/12.414085",

language = "English",

isbn = "0-8194-3847-2",

series = "Proceedings of SPIE",

publisher = "SPIE",

pages = "338--347",

editor = "A. Lapucci and M. Ciofini",

booktitle = "XIII International Symposium on Gas Flow and Chemical Lasers and High-Power Laser",

address = "United States",

note = "XIII International Symposium on Gas Flow and Chemical Lasers and High-Power Laser, Florence, Italy : XIII International Symposium on Gas Flow and Chemical Lasers and High-Power Laser ; Conference date: 18-09-2000 Through 22-09-2000",

}

Peters, PJM, Feenstra, L & Bastiaens, HMJ 2001, Long pulse ArF and F2 excimer lasers. in A Lapucci & M Ciofini (eds), XIII International Symposium on Gas Flow and Chemical Lasers and High-Power Laser. Proceedings of SPIE, vol. 4184, SPIE, pp. 338-347, XIII International Symposium on Gas Flow and Chemical Lasers and High-Power Laser, Florence, Italy, 18/09/00. https://doi.org/10.1117/12.414085

Long pulse ArF and F2 excimer lasers. / Peters, P.J.M.; Feenstra, L.; Bastiaens, Hubertus M.J.
XIII International Symposium on Gas Flow and Chemical Lasers and High-Power Laser. ed. / A. Lapucci; M. Ciofini. SPIE, 2001. p. 338-347 (Proceedings of SPIE; Vol. 4184).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

TY - GEN

T1 - Long pulse ArF and F2 excimer lasers

AU - Peters, P.J.M.

AU - Feenstra, L.

AU - Bastiaens, Hubertus M.J.

PY - 2001/9/18

Y1 - 2001/9/18

KW - METIS-204543

KW - IR-96099

U2 - 10.1117/12.414085

DO - 10.1117/12.414085

M3 - Conference contribution

SN - 0-8194-3847-2

T3 - Proceedings of SPIE

SP - 338

EP - 347

BT - XIII International Symposium on Gas Flow and Chemical Lasers and High-Power Laser

A2 - Lapucci, A.

A2 - Ciofini, M.

PB - SPIE

T2 - XIII International Symposium on Gas Flow and Chemical Lasers and High-Power Laser, Florence, Italy

Y2 - 18 September 2000 through 22 September 2000

ER -