Long Range, Direct Drive XY-(Phi=0)-Stage with Sub-micrometer Resolution

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Original languageEnglish
Title of host publicationProceedings of the Annual Meeting of the American Society for Precision Engineering
Pages207
Number of pages210
Publication statusPublished - Oct 1995
Externally publishedYes

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Bonnema, G. M. (1995). Long Range, Direct Drive XY-(Phi=0)-Stage with Sub-micrometer Resolution. In Proceedings of the Annual Meeting of the American Society for Precision Engineering (pp. 207)