Long Range, Direct Drive XY-(Phi=0)-Stage with Sub-micrometer Resolution

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

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Original languageEnglish
Title of host publicationProceedings of the Annual Meeting of the American Society for Precision Engineering
Pages207
Number of pages210
Publication statusPublished - Oct 1995
Externally publishedYes

Cite this

Bonnema, G. M. (1995). Long Range, Direct Drive XY-(Phi=0)-Stage with Sub-micrometer Resolution. In Proceedings of the Annual Meeting of the American Society for Precision Engineering (pp. 207)
Bonnema, Gerrit Maarten. / Long Range, Direct Drive XY-(Phi=0)-Stage with Sub-micrometer Resolution. Proceedings of the Annual Meeting of the American Society for Precision Engineering. 1995. pp. 207
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title = "Long Range, Direct Drive XY-(Phi=0)-Stage with Sub-micrometer Resolution",
author = "Bonnema, {Gerrit Maarten}",
year = "1995",
month = "10",
language = "English",
pages = "207",
booktitle = "Proceedings of the Annual Meeting of the American Society for Precision Engineering",

}

Bonnema, GM 1995, Long Range, Direct Drive XY-(Phi=0)-Stage with Sub-micrometer Resolution. in Proceedings of the Annual Meeting of the American Society for Precision Engineering. pp. 207.

Long Range, Direct Drive XY-(Phi=0)-Stage with Sub-micrometer Resolution. / Bonnema, Gerrit Maarten.

Proceedings of the Annual Meeting of the American Society for Precision Engineering. 1995. p. 207.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

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BT - Proceedings of the Annual Meeting of the American Society for Precision Engineering

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Bonnema GM. Long Range, Direct Drive XY-(Phi=0)-Stage with Sub-micrometer Resolution. In Proceedings of the Annual Meeting of the American Society for Precision Engineering. 1995. p. 207