| Original language | English |
|---|---|
| Title of host publication | Proceedings of the Annual Meeting of the American Society for Precision Engineering |
| Pages | 207 |
| Number of pages | 210 |
| Publication status | Published - Oct 1995 |
| Externally published | Yes |
Long Range, Direct Drive XY-(Phi=0)-Stage with Sub-micrometer Resolution
Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review
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