Long-range elastic guidance mechanisms for electrostatic comb-drive actuators

Dannis Michel Brouwer, A. Otten, Alexander Otten, Johannes Bernardus Charles Engelen, B. Krijnen, B. Krijnen, Herman Soemers

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

18 Citations (Scopus)
103 Downloads (Pure)

Abstract

The range of motion and output force of the often used electrostatic comb-drive with folded flexure straight guidance, as shown in Figure 1, is limited by sideways instability due to poor sideways stiffness of the folded flexure at relatively large deflections [1].
Original languageEnglish
Title of host publicationProceedings of the Tenth International Conference of the European Society for Precision Engineering & Nanotechnology
Place of PublicationDelft
PublisherEUSPEN
Pages47-50
Number of pages4
ISBN (Print)978-0-9553082-8-4
Publication statusPublished - Jun 2010
Event10th EUSPEN International Conference 2010 - Delft, Netherlands
Duration: 31 May 20104 Jun 2010
Conference number: 10

Publication series

Name
PublisherDelft University
Volume1

Conference

Conference10th EUSPEN International Conference 2010
Abbreviated titleEUSPEN
CountryNetherlands
CityDelft
Period31/05/104/06/10
OtherNOT the same as 10th Anniversary International Conference (see dates and place)

Fingerprint

flexing
actuators
electrostatics
deflection
stiffness
output

Keywords

  • METIS-267223
  • IR-75635
  • EWI-19240
  • TST-SMI: Formerly in EWI-SMI
  • TST-uSPAM: micro Scanning Probe Array Memory

Cite this

Brouwer, D. M., Otten, A., Otten, A., Engelen, J. B. C., Krijnen, B., Krijnen, B., & Soemers, H. (2010). Long-range elastic guidance mechanisms for electrostatic comb-drive actuators. In Proceedings of the Tenth International Conference of the European Society for Precision Engineering & Nanotechnology (pp. 47-50). Delft: EUSPEN.
Brouwer, Dannis Michel ; Otten, A. ; Otten, Alexander ; Engelen, Johannes Bernardus Charles ; Krijnen, B. ; Krijnen, B. ; Soemers, Herman. / Long-range elastic guidance mechanisms for electrostatic comb-drive actuators. Proceedings of the Tenth International Conference of the European Society for Precision Engineering & Nanotechnology. Delft : EUSPEN, 2010. pp. 47-50
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title = "Long-range elastic guidance mechanisms for electrostatic comb-drive actuators",
abstract = "The range of motion and output force of the often used electrostatic comb-drive with folded flexure straight guidance, as shown in Figure 1, is limited by sideways instability due to poor sideways stiffness of the folded flexure at relatively large deflections [1].",
keywords = "METIS-267223, IR-75635, EWI-19240, TST-SMI: Formerly in EWI-SMI, TST-uSPAM: micro Scanning Probe Array Memory",
author = "Brouwer, {Dannis Michel} and A. Otten and Alexander Otten and Engelen, {Johannes Bernardus Charles} and B. Krijnen and B. Krijnen and Herman Soemers",
year = "2010",
month = "6",
language = "English",
isbn = "978-0-9553082-8-4",
publisher = "EUSPEN",
pages = "47--50",
booktitle = "Proceedings of the Tenth International Conference of the European Society for Precision Engineering & Nanotechnology",

}

Brouwer, DM, Otten, A, Otten, A, Engelen, JBC, Krijnen, B, Krijnen, B & Soemers, H 2010, Long-range elastic guidance mechanisms for electrostatic comb-drive actuators. in Proceedings of the Tenth International Conference of the European Society for Precision Engineering & Nanotechnology. EUSPEN, Delft, pp. 47-50, 10th EUSPEN International Conference 2010, Delft, Netherlands, 31/05/10.

Long-range elastic guidance mechanisms for electrostatic comb-drive actuators. / Brouwer, Dannis Michel; Otten, A.; Otten, Alexander; Engelen, Johannes Bernardus Charles; Krijnen, B.; Krijnen, B.; Soemers, Herman.

Proceedings of the Tenth International Conference of the European Society for Precision Engineering & Nanotechnology. Delft : EUSPEN, 2010. p. 47-50.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

TY - GEN

T1 - Long-range elastic guidance mechanisms for electrostatic comb-drive actuators

AU - Brouwer, Dannis Michel

AU - Otten, A.

AU - Otten, Alexander

AU - Engelen, Johannes Bernardus Charles

AU - Krijnen, B.

AU - Krijnen, B.

AU - Soemers, Herman

PY - 2010/6

Y1 - 2010/6

N2 - The range of motion and output force of the often used electrostatic comb-drive with folded flexure straight guidance, as shown in Figure 1, is limited by sideways instability due to poor sideways stiffness of the folded flexure at relatively large deflections [1].

AB - The range of motion and output force of the often used electrostatic comb-drive with folded flexure straight guidance, as shown in Figure 1, is limited by sideways instability due to poor sideways stiffness of the folded flexure at relatively large deflections [1].

KW - METIS-267223

KW - IR-75635

KW - EWI-19240

KW - TST-SMI: Formerly in EWI-SMI

KW - TST-uSPAM: micro Scanning Probe Array Memory

M3 - Conference contribution

SN - 978-0-9553082-8-4

SP - 47

EP - 50

BT - Proceedings of the Tenth International Conference of the European Society for Precision Engineering & Nanotechnology

PB - EUSPEN

CY - Delft

ER -

Brouwer DM, Otten A, Otten A, Engelen JBC, Krijnen B, Krijnen B et al. Long-range elastic guidance mechanisms for electrostatic comb-drive actuators. In Proceedings of the Tenth International Conference of the European Society for Precision Engineering & Nanotechnology. Delft: EUSPEN. 2010. p. 47-50