Long-range elastic guidance mechanisms for electrostatic comb-drive actuators

D.M. Brouwer; A. Otten; J.B.C. Engelen; B. Krijnen; H.M.J.R. Soemers

Long-range elastic guidance mechanisms for electrostatic comb-drive actuators

D.M. Brouwer, A. Otten, J.B.C. Engelen, B. Krijnen, H.M.J.R. Soemers

Faculty of Engineering Technology

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic

21 Citations (Scopus)

195 Downloads (Pure)

Abstract

The range of motion and output force of the often used electrostatic comb-drive with folded flexure straight guidance, as shown in Figure 1, is limited by sideways instability due to poor sideways stiffness of the folded flexure at relatively large deflections [1].

Original language	English
Title of host publication	Proceedings of the Tenth International Conference of the European Society for Precision Engineering & Nanotechnology
Place of Publication	Delft
Publisher	EUSPEN
Pages	47-50
Number of pages	4
Volume	1
ISBN (Print)	978-0-9553082-8-4
Publication status	Published - Jun 2010
Event	10th EUSPEN International Conference 2010 - Delft, Netherlands Duration: 31 May 2010 → 4 Jun 2010 Conference number: 10

Conference

Conference	10th EUSPEN International Conference 2010
Abbreviated title	EUSPEN
Country/Territory	Netherlands
City	Delft
Period	31/05/10 → 4/06/10
Other	NOT the same as 10th Anniversary International Conference (see dates and place)

Keywords

TST-SMI: Formerly in EWI-SMI
TST-uSPAM: micro Scanning Probe Array Memory

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@inproceedings{a0885c08e7a54f549c128cb21146cc6b,

title = "Long-range elastic guidance mechanisms for electrostatic comb-drive actuators",

abstract = "The range of motion and output force of the often used electrostatic comb-drive with folded flexure straight guidance, as shown in Figure 1, is limited by sideways instability due to poor sideways stiffness of the folded flexure at relatively large deflections [1].",

keywords = "TST-SMI: Formerly in EWI-SMI, TST-uSPAM: micro Scanning Probe Array Memory",

author = "D.M. Brouwer and A. Otten and J.B.C. Engelen and B. Krijnen and H.M.J.R. Soemers",

year = "2010",

month = jun,

language = "English",

isbn = "978-0-9553082-8-4",

volume = "1",

pages = "47--50",

booktitle = "Proceedings of the Tenth International Conference of the European Society for Precision Engineering & Nanotechnology",

publisher = "EUSPEN",

note = "10th EUSPEN International Conference 2010, EUSPEN ; Conference date: 31-05-2010 Through 04-06-2010",

}

Brouwer, DM, Otten, A, Engelen, JBC, Krijnen, B & Soemers, HMJR 2010, Long-range elastic guidance mechanisms for electrostatic comb-drive actuators. in Proceedings of the Tenth International Conference of the European Society for Precision Engineering & Nanotechnology. vol. 1, EUSPEN, Delft, pp. 47-50, 10th EUSPEN International Conference 2010, Delft, Netherlands, 31/05/10.

Long-range elastic guidance mechanisms for electrostatic comb-drive actuators. / Brouwer, D.M.; Otten, A.; Engelen, J.B.C. et al.
Proceedings of the Tenth International Conference of the European Society for Precision Engineering & Nanotechnology. Vol. 1 Delft: EUSPEN, 2010. p. 47-50.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic

TY - GEN

T1 - Long-range elastic guidance mechanisms for electrostatic comb-drive actuators

AU - Brouwer, D.M.

AU - Otten, A.

AU - Engelen, J.B.C.

AU - Krijnen, B.

AU - Soemers, H.M.J.R.

N1 - Conference code: 10

PY - 2010/6

Y1 - 2010/6

N2 - The range of motion and output force of the often used electrostatic comb-drive with folded flexure straight guidance, as shown in Figure 1, is limited by sideways instability due to poor sideways stiffness of the folded flexure at relatively large deflections [1].

AB - The range of motion and output force of the often used electrostatic comb-drive with folded flexure straight guidance, as shown in Figure 1, is limited by sideways instability due to poor sideways stiffness of the folded flexure at relatively large deflections [1].

KW - TST-SMI: Formerly in EWI-SMI

KW - TST-uSPAM: micro Scanning Probe Array Memory

M3 - Conference contribution

SN - 978-0-9553082-8-4

VL - 1

SP - 47

EP - 50

BT - Proceedings of the Tenth International Conference of the European Society for Precision Engineering & Nanotechnology

PB - EUSPEN

CY - Delft

T2 - 10th EUSPEN International Conference 2010

Y2 - 31 May 2010 through 4 June 2010

ER -

Long-range elastic guidance mechanisms for electrostatic comb-drive actuators

Abstract

Conference

Keywords

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