Long-range elastic guidance mechanisms for electrostatic comb-drive actuators

Dannis Michel Brouwer, A. Otten, Alexander Otten, Johannes Bernardus Charles Engelen, B. Krijnen, B. Krijnen, Herman Soemers

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

19 Citations (Scopus)
119 Downloads (Pure)

Abstract

The range of motion and output force of the often used electrostatic comb-drive with folded flexure straight guidance, as shown in Figure 1, is limited by sideways instability due to poor sideways stiffness of the folded flexure at relatively large deflections [1].
Original languageEnglish
Title of host publicationProceedings of the Tenth International Conference of the European Society for Precision Engineering & Nanotechnology
Place of PublicationDelft
PublisherEUSPEN
Pages47-50
Number of pages4
ISBN (Print)978-0-9553082-8-4
Publication statusPublished - Jun 2010
Event10th EUSPEN International Conference 2010 - Delft, Netherlands
Duration: 31 May 20104 Jun 2010
Conference number: 10

Publication series

Name
PublisherDelft University
Volume1

Conference

Conference10th EUSPEN International Conference 2010
Abbreviated titleEUSPEN
CountryNetherlands
CityDelft
Period31/05/104/06/10
OtherNOT the same as 10th Anniversary International Conference (see dates and place)

Keywords

  • METIS-267223
  • IR-75635
  • EWI-19240
  • TST-SMI: Formerly in EWI-SMI
  • TST-uSPAM: micro Scanning Probe Array Memory

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  • Cite this

    Brouwer, D. M., Otten, A., Otten, A., Engelen, J. B. C., Krijnen, B., Krijnen, B., & Soemers, H. (2010). Long-range elastic guidance mechanisms for electrostatic comb-drive actuators. In Proceedings of the Tenth International Conference of the European Society for Precision Engineering & Nanotechnology (pp. 47-50). Delft: EUSPEN.