Abstract
A silicon load cell (force sensor) is presented which is
based on a new operating principle. The force is measured
by compressing a meander like strain gage. A second
strain gage which is not loaded, is used for temperature
compensation and for compensation of bending and
stretching stresses in the chip. Also, same changes in zero
load resistor values are eliminated. It is shown that the
output of the bridge is a linear function of the total force
and independent of the force distribution on the silicon
chip. Measurements up to 1000 kg show a linear respons
and a short term repeatability which is within 0.1 %.
Creep after 30 minutes is within 1.2 %.
Original language | English |
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Title of host publication | The 10th Micromechanics Europe Workshop, MME '99 |
Subtitle of host publication | September 27-28, 1999, Gif sur Yvette, France : proceedings |
Place of Publication | Orsay |
Publisher | Université Paris-sud, Institut d'Électronique Fondamentale |
Pages | 81-84 |
Number of pages | 4 |
Publication status | Published - 27 Sep 1999 |
Event | 10th Micromechanics Europe Workshop, MME 1999 - Gif-sur-Yvette, France Duration: 27 Sep 1999 → 28 Sep 1999 Conference number: 10 |
Workshop
Workshop | 10th Micromechanics Europe Workshop, MME 1999 |
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Abbreviated title | MME |
Country | France |
City | Gif-sur-Yvette |
Period | 27/09/99 → 28/09/99 |