Low-cost piezoresistive silicon load cell independent of force distribution

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

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Abstract

A silicon load cell (force sensor) is presented which is based on a new operating principle. The force is measured by compressing a meander like strain gage. A second strain gage which is not loaded, is used for temperature compensation and for compensation of bending and stretching stresses in the chip. Also, same changes in zero load resistor values are eliminated. It is shown that the output of the bridge is a linear function of the total force and independent of the force distribution on the silicon chip. Measurements up to 1000 kg show a linear respons and a short term repeatability which is within 0.1 %. Creep after 30 minutes is within 1.2 %.
Original languageUndefined
Title of host publicationProceedings of Micromechanics Europe '99 Conference
Place of PublicationGif-sur-Yvette, France
Pages81-84
Number of pages4
Publication statusPublished - 27 Sep 1999
Event10th Micromechanics Europe Workshop, MME 1999 - Gif-sur-Yvette, France
Duration: 27 Sep 199928 Sep 1999
Conference number: 10

Workshop

Workshop10th Micromechanics Europe Workshop, MME 1999
Abbreviated titleMME
CountryFrance
CityGif-sur-Yvette
Period27/09/9928/09/99

Keywords

  • IR-15826
  • METIS-112708

Cite this

Zwijze, A. F., Wiegerink, R. J., Krijnen, G. J. M., Lammerink, T. S. J., & Elwenspoek, M. C. (1999). Low-cost piezoresistive silicon load cell independent of force distribution. In Proceedings of Micromechanics Europe '99 Conference (pp. 81-84). Gif-sur-Yvette, France.
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title = "Low-cost piezoresistive silicon load cell independent of force distribution",
abstract = "A silicon load cell (force sensor) is presented which is based on a new operating principle. The force is measured by compressing a meander like strain gage. A second strain gage which is not loaded, is used for temperature compensation and for compensation of bending and stretching stresses in the chip. Also, same changes in zero load resistor values are eliminated. It is shown that the output of the bridge is a linear function of the total force and independent of the force distribution on the silicon chip. Measurements up to 1000 kg show a linear respons and a short term repeatability which is within 0.1 {\%}. Creep after 30 minutes is within 1.2 {\%}.",
keywords = "IR-15826, METIS-112708",
author = "A.F. Zwijze and Wiegerink, {Remco J.} and Krijnen, {Gijsbertus J.M.} and Lammerink, {Theodorus S.J.} and Elwenspoek, {Michael Curt}",
year = "1999",
month = "9",
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language = "Undefined",
pages = "81--84",
booktitle = "Proceedings of Micromechanics Europe '99 Conference",

}

Zwijze, AF, Wiegerink, RJ, Krijnen, GJM, Lammerink, TSJ & Elwenspoek, MC 1999, Low-cost piezoresistive silicon load cell independent of force distribution. in Proceedings of Micromechanics Europe '99 Conference. Gif-sur-Yvette, France, pp. 81-84, 10th Micromechanics Europe Workshop, MME 1999, Gif-sur-Yvette, France, 27/09/99.

Low-cost piezoresistive silicon load cell independent of force distribution. / Zwijze, A.F.; Wiegerink, Remco J.; Krijnen, Gijsbertus J.M.; Lammerink, Theodorus S.J.; Elwenspoek, Michael Curt.

Proceedings of Micromechanics Europe '99 Conference. Gif-sur-Yvette, France, 1999. p. 81-84.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

TY - GEN

T1 - Low-cost piezoresistive silicon load cell independent of force distribution

AU - Zwijze, A.F.

AU - Wiegerink, Remco J.

AU - Krijnen, Gijsbertus J.M.

AU - Lammerink, Theodorus S.J.

AU - Elwenspoek, Michael Curt

PY - 1999/9/27

Y1 - 1999/9/27

N2 - A silicon load cell (force sensor) is presented which is based on a new operating principle. The force is measured by compressing a meander like strain gage. A second strain gage which is not loaded, is used for temperature compensation and for compensation of bending and stretching stresses in the chip. Also, same changes in zero load resistor values are eliminated. It is shown that the output of the bridge is a linear function of the total force and independent of the force distribution on the silicon chip. Measurements up to 1000 kg show a linear respons and a short term repeatability which is within 0.1 %. Creep after 30 minutes is within 1.2 %.

AB - A silicon load cell (force sensor) is presented which is based on a new operating principle. The force is measured by compressing a meander like strain gage. A second strain gage which is not loaded, is used for temperature compensation and for compensation of bending and stretching stresses in the chip. Also, same changes in zero load resistor values are eliminated. It is shown that the output of the bridge is a linear function of the total force and independent of the force distribution on the silicon chip. Measurements up to 1000 kg show a linear respons and a short term repeatability which is within 0.1 %. Creep after 30 minutes is within 1.2 %.

KW - IR-15826

KW - METIS-112708

M3 - Conference contribution

SP - 81

EP - 84

BT - Proceedings of Micromechanics Europe '99 Conference

CY - Gif-sur-Yvette, France

ER -

Zwijze AF, Wiegerink RJ, Krijnen GJM, Lammerink TSJ, Elwenspoek MC. Low-cost piezoresistive silicon load cell independent of force distribution. In Proceedings of Micromechanics Europe '99 Conference. Gif-sur-Yvette, France. 1999. p. 81-84