Low-cost piezoresistive silicon load cell independent of force distribution

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    Abstract

    A silicon load cell (force sensor) is presented which is based on a new operating principle. The force is measured by compressing a meander like strain gage. A second strain gage which is not loaded, is used for temperature compensation and for compensation of bending and stretching stresses in the chip. Also, same changes in zero load resistor values are eliminated. It is shown that the output of the bridge is a linear function of the total force and independent of the force distribution on the silicon chip. Measurements up to 1000 kg show a linear respons and a short term repeatability which is within 0.1 %. Creep after 30 minutes is within 1.2 %.
    Original languageUndefined
    Title of host publicationProceedings of Micromechanics Europe '99 Conference
    Place of PublicationGif-sur-Yvette, France
    Pages81-84
    Number of pages4
    Publication statusPublished - 27 Sep 1999
    Event10th Micromechanics Europe Workshop, MME 1999 - Gif-sur-Yvette, France
    Duration: 27 Sep 199928 Sep 1999
    Conference number: 10

    Workshop

    Workshop10th Micromechanics Europe Workshop, MME 1999
    Abbreviated titleMME
    CountryFrance
    CityGif-sur-Yvette
    Period27/09/9928/09/99

    Keywords

    • IR-15826
    • METIS-112708

    Cite this

    Zwijze, A. F., Wiegerink, R. J., Krijnen, G. J. M., Lammerink, T. S. J., & Elwenspoek, M. C. (1999). Low-cost piezoresistive silicon load cell independent of force distribution. In Proceedings of Micromechanics Europe '99 Conference (pp. 81-84). Gif-sur-Yvette, France.