Low-cost piezoresistive silicon load cell independent of force distribution

A.F. Zwijze; Remco J. Wiegerink; Gijsbertus J.M. Krijnen; Theodorus S.J. Lammerink; Michael Curt Elwenspoek

Low-cost piezoresistive silicon load cell independent of force distribution

A.F. Zwijze, Remco J. Wiegerink, Gijsbertus J.M. Krijnen, Theodorus S.J. Lammerink, Michael Curt Elwenspoek

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

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Abstract

A silicon load cell (force sensor) is presented which is based on a new operating principle. The force is measured by compressing a meander like strain gage. A second strain gage which is not loaded, is used for temperature compensation and for compensation of bending and stretching stresses in the chip. Also, same changes in zero load resistor values are eliminated. It is shown that the output of the bridge is a linear function of the total force and independent of the force distribution on the silicon chip. Measurements up to 1000 kg show a linear respons and a short term repeatability which is within 0.1 %. Creep after 30 minutes is within 1.2 %.

Original language	English
Title of host publication	The 10th Micromechanics Europe Workshop, MME '99
Subtitle of host publication	September 27-28, 1999, Gif sur Yvette, France : proceedings
Place of Publication	Orsay
Publisher	Université Paris-sud, Institut d'Électronique Fondamentale
Pages	81-84
Number of pages	4
Publication status	Published - 27 Sep 1999
Event	10th Micromechanics Europe Workshop, MME 1999 - Gif-sur-Yvette, France Duration: 27 Sep 1999 → 28 Sep 1999 Conference number: 10

Workshop

Workshop	10th Micromechanics Europe Workshop, MME 1999
Abbreviated title	MME
Country	France
City	Gif-sur-Yvette
Period	27/09/99 → 28/09/99

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Zwijze, A.F. ; Wiegerink, Remco J. ; Krijnen, Gijsbertus J.M. ; Lammerink, Theodorus S.J. ; Elwenspoek, Michael Curt. / Low-cost piezoresistive silicon load cell independent of force distribution. The 10th Micromechanics Europe Workshop, MME '99: September 27-28, 1999, Gif sur Yvette, France : proceedings. Orsay : Université Paris-sud, Institut d'Électronique Fondamentale, 1999. pp. 81-84

@inproceedings{76a2283d0c6a40c28e9e7af5ba75bedb,

title = "Low-cost piezoresistive silicon load cell independent of force distribution",

abstract = "A silicon load cell (force sensor) is presented which is based on a new operating principle. The force is measured by compressing a meander like strain gage. A second strain gage which is not loaded, is used for temperature compensation and for compensation of bending and stretching stresses in the chip. Also, same changes in zero load resistor values are eliminated. It is shown that the output of the bridge is a linear function of the total force and independent of the force distribution on the silicon chip. Measurements up to 1000 kg show a linear respons and a short term repeatability which is within 0.1 %. Creep after 30 minutes is within 1.2 %.",

author = "A.F. Zwijze and Wiegerink, {Remco J.} and Krijnen, {Gijsbertus J.M.} and Lammerink, {Theodorus S.J.} and Elwenspoek, {Michael Curt}",

year = "1999",

month = sep,

day = "27",

language = "English",

pages = "81--84",

booktitle = "The 10th Micromechanics Europe Workshop, MME '99",

publisher = "Universit{\'e} Paris-sud, Institut d'{\'E}lectronique Fondamentale",

note = "10th Micromechanics Europe Workshop, MME 1999, MME ; Conference date: 27-09-1999 Through 28-09-1999",

}

Zwijze, AF, Wiegerink, RJ , Krijnen, GJM , Lammerink, TSJ & Elwenspoek, MC 1999, Low-cost piezoresistive silicon load cell independent of force distribution. in The 10th Micromechanics Europe Workshop, MME '99: September 27-28, 1999, Gif sur Yvette, France : proceedings. Université Paris-sud, Institut d'Électronique Fondamentale, Orsay, pp. 81-84, 10th Micromechanics Europe Workshop, MME 1999, Gif-sur-Yvette, France, 27/09/99.

Low-cost piezoresistive silicon load cell independent of force distribution. / Zwijze, A.F.; Wiegerink, Remco J.; Krijnen, Gijsbertus J.M.; Lammerink, Theodorus S.J.; Elwenspoek, Michael Curt.

The 10th Micromechanics Europe Workshop, MME '99: September 27-28, 1999, Gif sur Yvette, France : proceedings. Orsay : Université Paris-sud, Institut d'Électronique Fondamentale, 1999. p. 81-84.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

TY - GEN

T1 - Low-cost piezoresistive silicon load cell independent of force distribution

AU - Zwijze, A.F.

AU - Wiegerink, Remco J.

AU - Krijnen, Gijsbertus J.M.

AU - Lammerink, Theodorus S.J.

AU - Elwenspoek, Michael Curt

N1 - Conference code: 10

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N2 - A silicon load cell (force sensor) is presented which is based on a new operating principle. The force is measured by compressing a meander like strain gage. A second strain gage which is not loaded, is used for temperature compensation and for compensation of bending and stretching stresses in the chip. Also, same changes in zero load resistor values are eliminated. It is shown that the output of the bridge is a linear function of the total force and independent of the force distribution on the silicon chip. Measurements up to 1000 kg show a linear respons and a short term repeatability which is within 0.1 %. Creep after 30 minutes is within 1.2 %.

AB - A silicon load cell (force sensor) is presented which is based on a new operating principle. The force is measured by compressing a meander like strain gage. A second strain gage which is not loaded, is used for temperature compensation and for compensation of bending and stretching stresses in the chip. Also, same changes in zero load resistor values are eliminated. It is shown that the output of the bridge is a linear function of the total force and independent of the force distribution on the silicon chip. Measurements up to 1000 kg show a linear respons and a short term repeatability which is within 0.1 %. Creep after 30 minutes is within 1.2 %.

M3 - Conference contribution

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EP - 84

BT - The 10th Micromechanics Europe Workshop, MME '99

PB - Université Paris-sud, Institut d'Électronique Fondamentale

CY - Orsay

T2 - 10th Micromechanics Europe Workshop, MME 1999

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