Low-cost piezoresistive silicon load cell independent of force distribution

A.F. Zwijze; Remco J. Wiegerink; Gijsbertus J.M. Krijnen; Theodorus S.J. Lammerink; Michael Curt Elwenspoek

Low-cost piezoresistive silicon load cell independent of force distribution

A.F. Zwijze, Remco J. Wiegerink, Gijsbertus J.M. Krijnen, Theodorus S.J. Lammerink, Michael Curt Elwenspoek

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

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Abstract

A silicon load cell (force sensor) is presented which is based on a new operating principle. The force is measured by compressing a meander like strain gage. A second strain gage which is not loaded, is used for temperature compensation and for compensation of bending and stretching stresses in the chip. Also, same changes in zero load resistor values are eliminated. It is shown that the output of the bridge is a linear function of the total force and independent of the force distribution on the silicon chip. Measurements up to 1000 kg show a linear respons and a short term repeatability which is within 0.1 %. Creep after 30 minutes is within 1.2 %.

Original language	Undefined
Title of host publication	Proceedings of Micromechanics Europe '99 Conference
Place of Publication	Gif-sur-Yvette, France
Pages	81-84
Number of pages	4
Publication status	Published - 27 Sep 1999
Event	10th Micromechanics Europe Workshop, MME 1999 - Gif-sur-Yvette, France Duration: 27 Sep 1999 → 28 Sep 1999 Conference number: 10

Workshop

Workshop	10th Micromechanics Europe Workshop, MME 1999
Abbreviated title	MME
Country	France
City	Gif-sur-Yvette
Period	27/09/99 → 28/09/99

Keywords

IR-15826
METIS-112708

Access to Document

mme99[1]
open

Cite this

Zwijze, A. F., Wiegerink, R. J., Krijnen, G. J. M., Lammerink, T. S. J., & Elwenspoek, M. C. (1999). Low-cost piezoresistive silicon load cell independent of force distribution. In Proceedings of Micromechanics Europe '99 Conference (pp. 81-84). Gif-sur-Yvette, France.

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title = "Low-cost piezoresistive silicon load cell independent of force distribution",

abstract = "A silicon load cell (force sensor) is presented which is based on a new operating principle. The force is measured by compressing a meander like strain gage. A second strain gage which is not loaded, is used for temperature compensation and for compensation of bending and stretching stresses in the chip. Also, same changes in zero load resistor values are eliminated. It is shown that the output of the bridge is a linear function of the total force and independent of the force distribution on the silicon chip. Measurements up to 1000 kg show a linear respons and a short term repeatability which is within 0.1 {\%}. Creep after 30 minutes is within 1.2 {\%}.",

keywords = "IR-15826, METIS-112708",

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Low-cost piezoresistive silicon load cell independent of force distribution. / Zwijze, A.F.; Wiegerink, Remco J.; Krijnen, Gijsbertus J.M.; Lammerink, Theodorus S.J.; Elwenspoek, Michael Curt.

Proceedings of Micromechanics Europe '99 Conference. Gif-sur-Yvette, France, 1999. p. 81-84.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

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AU - Zwijze, A.F.

AU - Wiegerink, Remco J.

AU - Krijnen, Gijsbertus J.M.

AU - Lammerink, Theodorus S.J.

AU - Elwenspoek, Michael Curt

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N2 - A silicon load cell (force sensor) is presented which is based on a new operating principle. The force is measured by compressing a meander like strain gage. A second strain gage which is not loaded, is used for temperature compensation and for compensation of bending and stretching stresses in the chip. Also, same changes in zero load resistor values are eliminated. It is shown that the output of the bridge is a linear function of the total force and independent of the force distribution on the silicon chip. Measurements up to 1000 kg show a linear respons and a short term repeatability which is within 0.1 %. Creep after 30 minutes is within 1.2 %.

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