Low-cost piezoresistive silicon load cell independent of force distribution

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Abstract

A silicon load cell (force sensor) that is based on a new operating principle is presented. The force is measured by compressing a meander-like strain gage. A second strain gage, which is not loaded, is used for temperature compensation and for compensation of bending and stretching stresses in the chip. Also, the same changes in a zero-load resistor values are eliminated. It is shown that the output of the bridge is a linear function of the total force and independent of the force distribution on the silicon chip. Measurements up to 1000 kg show a linear response and a short-term repeatability to within 0.1%. Creep after 30 min within 1.2%.
Original languageUndefined
Pages (from-to)200-203
Number of pages4
JournalJournal of micromechanics and microengineering
Volume10
Issue number2
DOIs
Publication statusPublished - Jun 2000

Keywords

  • IR-14622
  • METIS-111703
  • EWI-12959

Cite this

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title = "Low-cost piezoresistive silicon load cell independent of force distribution",
abstract = "A silicon load cell (force sensor) that is based on a new operating principle is presented. The force is measured by compressing a meander-like strain gage. A second strain gage, which is not loaded, is used for temperature compensation and for compensation of bending and stretching stresses in the chip. Also, the same changes in a zero-load resistor values are eliminated. It is shown that the output of the bridge is a linear function of the total force and independent of the force distribution on the silicon chip. Measurements up to 1000 kg show a linear response and a short-term repeatability to within 0.1{\%}. Creep after 30 min within 1.2{\%}.",
keywords = "IR-14622, METIS-111703, EWI-12959",
author = "A.F. Zwijze and Wiegerink, {Remco J.} and Krijnen, {Gijsbertus J.M.} and Lammerink, {Theodorus S.J.} and Elwenspoek, {Michael Curt}",
year = "2000",
month = "6",
doi = "10.1088/0960-1317/10/2/317",
language = "Undefined",
volume = "10",
pages = "200--203",
journal = "Journal of micromechanics and microengineering",
issn = "0960-1317",
publisher = "IOP Publishing Ltd.",
number = "2",

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TY - JOUR

T1 - Low-cost piezoresistive silicon load cell independent of force distribution

AU - Zwijze, A.F.

AU - Wiegerink, Remco J.

AU - Krijnen, Gijsbertus J.M.

AU - Lammerink, Theodorus S.J.

AU - Elwenspoek, Michael Curt

PY - 2000/6

Y1 - 2000/6

N2 - A silicon load cell (force sensor) that is based on a new operating principle is presented. The force is measured by compressing a meander-like strain gage. A second strain gage, which is not loaded, is used for temperature compensation and for compensation of bending and stretching stresses in the chip. Also, the same changes in a zero-load resistor values are eliminated. It is shown that the output of the bridge is a linear function of the total force and independent of the force distribution on the silicon chip. Measurements up to 1000 kg show a linear response and a short-term repeatability to within 0.1%. Creep after 30 min within 1.2%.

AB - A silicon load cell (force sensor) that is based on a new operating principle is presented. The force is measured by compressing a meander-like strain gage. A second strain gage, which is not loaded, is used for temperature compensation and for compensation of bending and stretching stresses in the chip. Also, the same changes in a zero-load resistor values are eliminated. It is shown that the output of the bridge is a linear function of the total force and independent of the force distribution on the silicon chip. Measurements up to 1000 kg show a linear response and a short-term repeatability to within 0.1%. Creep after 30 min within 1.2%.

KW - IR-14622

KW - METIS-111703

KW - EWI-12959

U2 - 10.1088/0960-1317/10/2/317

DO - 10.1088/0960-1317/10/2/317

M3 - Article

VL - 10

SP - 200

EP - 203

JO - Journal of micromechanics and microengineering

JF - Journal of micromechanics and microengineering

SN - 0960-1317

IS - 2

ER -