Low-cost piezoresistive silicon load cell independent of force distribution

A.F. Zwijze; Remco J. Wiegerink; Gijsbertus J.M. Krijnen; Theodorus S.J. Lammerink; Michael Curt Elwenspoek

doi:10.1088/0960-1317/10/2/317

Low-cost piezoresistive silicon load cell independent of force distribution

A.F. Zwijze, Remco J. Wiegerink, Gijsbertus J.M. Krijnen, Theodorus S.J. Lammerink, Michael Curt Elwenspoek

Research output: Contribution to journal › Article › Academic › peer-review

5 Citations (Scopus)

13 Downloads (Pure)

Abstract

A silicon load cell (force sensor) that is based on a new operating principle is presented. The force is measured by compressing a meander-like strain gage. A second strain gage, which is not loaded, is used for temperature compensation and for compensation of bending and stretching stresses in the chip. Also, the same changes in a zero-load resistor values are eliminated. It is shown that the output of the bridge is a linear function of the total force and independent of the force distribution on the silicon chip. Measurements up to 1000 kg show a linear response and a short-term repeatability to within 0.1%. Creep after 30 min within 1.2%.

Original language	Undefined
Pages (from-to)	200-203
Number of pages	4
Journal	Journal of micromechanics and microengineering
Volume	10
Issue number	2
DOIs	https://doi.org/10.1088/0960-1317/10/2/317
Publication status	Published - Jun 2000

Keywords

IR-14622
METIS-111703
EWI-12959

Access to Document

10.1088/0960-1317/10/2/317

http://eprints.eemcs.utwente.nl/secure2/12959/01/Zwijze_JMM_2000.pdf

5 Citations
1 Conference contribution

Low-cost piezoresistive silicon load cell independent of force distribution
Zwijze, A. F., Wiegerink, R. J., Krijnen, G. J. M., Lammerink, T. S. J. & Elwenspoek, M. C., 27 Sept 1999, The 10th Micromechanics Europe Workshop, MME '99: September 27-28, 1999, Gif sur Yvette, France : proceedings. Orsay: Université Paris-sud, Institut d'Électronique Fondamentale, p. 81-84 4 p.
Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

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Cite this

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AU - Lammerink, Theodorus S.J.

AU - Elwenspoek, Michael Curt

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