Low-cost piezoresistive silicon load cell independent of force distribution

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    Abstract

    A silicon load cell (force sensor) that is based on a new operating principle is presented. The force is measured by compressing a meander-like strain gage. A second strain gage, which is not loaded, is used for temperature compensation and for compensation of bending and stretching stresses in the chip. Also, the same changes in a zero-load resistor values are eliminated. It is shown that the output of the bridge is a linear function of the total force and independent of the force distribution on the silicon chip. Measurements up to 1000 kg show a linear response and a short-term repeatability to within 0.1%. Creep after 30 min within 1.2%.
    Original languageUndefined
    Pages (from-to)200-203
    Number of pages4
    JournalJournal of micromechanics and microengineering
    Volume10
    Issue number2
    DOIs
    Publication statusPublished - Jun 2000

    Keywords

    • IR-14622
    • METIS-111703
    • EWI-12959

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