Abstract
Nowadays, micro- and nanochips are usually
fabricated with Silicon and/or glass. A simple, low-cost and
reliable integration packaging method that provides flexibility
to the incorporation of electronic and fluidic devices into a
system has not been fully developed yet. The use of Printed
Circuit Board material as substrate to create dry film resist
microfluidic channels is the core technology to provide such an
integration method. The feasibility and potential of the
proposed packaging method is demonstrated in this work
Original language | English |
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Pages (from-to) | 11-21 |
Number of pages | 11 |
Journal | International journal on advances in systems and measurements |
Volume | 5 |
Issue number | 1-2 |
Publication status | Published - 2012 |
Keywords
- IR-80964
- METIS-287303