Low creep and hysteresis silicon load cell based on a force-to-liquid pressure transformation

Robert A.F. Zwijze; Remco J. Wiegerink; Theo S.J. Lammerink; Miko Elwenspoek

Low creep and hysteresis silicon load cell based on a force-to-liquid pressure transformation

Robert A.F. Zwijze, Remco J. Wiegerink, Theo S.J. Lammerink, Miko Elwenspoek

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

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Abstract

Important problems in load cells are creep and hysteresis. Expensive high grade steels are used in order to reduce these effects. In this paper a silicon load cell design is presented which is based on a force-to-liquid-pressure transformation. The design is insensitive to hysteresis and creep, can be made at very low costs and is able to measure loads up to 1000 kg with an accuracy of 0.03 %. Analytical, numerical and experimental results on a macroscopic steel load cell are in very close agreement with each other.

Original language	English
Title of host publication	Proceedings of the Micromechanics Europe 1998 Conference (MME)
Place of Publication	Ulvik, Norway
Pages	260-263
Publication status	Published - 3 Jun 1998
Event	9th Micromechanics Europe Workshop, MME 1998 - Ulvik, Norway Duration: 3 Jun 1998 → 5 Jun 1998 Conference number: 9

Conference

Conference	9th Micromechanics Europe Workshop, MME 1998
Abbreviated title	MME
Country/Territory	Norway
City	Ulvik
Period	3/06/98 → 5/06/98

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title = "Low creep and hysteresis silicon load cell based on a force-to-liquid pressure transformation",

abstract = "Important problems in load cells are creep and hysteresis. Expensive high grade steels are used in order to reduce these effects. In this paper a silicon load cell design is presented which is based on a force-to-liquid-pressure transformation. The design is insensitive to hysteresis and creep, can be made at very low costs and is able to measure loads up to 1000 kg with an accuracy of 0.03 %. Analytical, numerical and experimental results on a macroscopic steel load cell are in very close agreement with each other.",

author = "Zwijze, {Robert A.F.} and Wiegerink, {Remco J.} and Lammerink, {Theo S.J.} and Miko Elwenspoek",

year = "1998",

month = jun,

day = "3",

language = "English",

pages = "260--263",

booktitle = "Proceedings of the Micromechanics Europe 1998 Conference (MME)",

note = "9th Micromechanics Europe Workshop, MME 1998, MME ; Conference date: 03-06-1998 Through 05-06-1998",

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Low creep and hysteresis silicon load cell based on a force-to-liquid pressure transformation. / Zwijze, Robert A.F.; Wiegerink, Remco J.; Lammerink, Theo S.J. et al.
Proceedings of the Micromechanics Europe 1998 Conference (MME). Ulvik, Norway, 1998. p. 260-263.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

TY - GEN

T1 - Low creep and hysteresis silicon load cell based on a force-to-liquid pressure transformation

AU - Zwijze, Robert A.F.

AU - Wiegerink, Remco J.

AU - Lammerink, Theo S.J.

AU - Elwenspoek, Miko

N1 - Conference code: 9

PY - 1998/6/3

Y1 - 1998/6/3

N2 - Important problems in load cells are creep and hysteresis. Expensive high grade steels are used in order to reduce these effects. In this paper a silicon load cell design is presented which is based on a force-to-liquid-pressure transformation. The design is insensitive to hysteresis and creep, can be made at very low costs and is able to measure loads up to 1000 kg with an accuracy of 0.03 %. Analytical, numerical and experimental results on a macroscopic steel load cell are in very close agreement with each other.

AB - Important problems in load cells are creep and hysteresis. Expensive high grade steels are used in order to reduce these effects. In this paper a silicon load cell design is presented which is based on a force-to-liquid-pressure transformation. The design is insensitive to hysteresis and creep, can be made at very low costs and is able to measure loads up to 1000 kg with an accuracy of 0.03 %. Analytical, numerical and experimental results on a macroscopic steel load cell are in very close agreement with each other.

M3 - Conference contribution

SP - 260

EP - 263

BT - Proceedings of the Micromechanics Europe 1998 Conference (MME)

CY - Ulvik, Norway

T2 - 9th Micromechanics Europe Workshop, MME 1998

Y2 - 3 June 1998 through 5 June 1998

ER -

Low creep and hysteresis silicon load cell based on a force-to-liquid pressure transformation

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