Low creep and hysteresis silicon load cell based on a force-to-liquid pressure transformation

A.F. Zwijze, Remco J. Wiegerink, Theodorus S.J. Lammerink, Michael Curt Elwenspoek

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    Abstract

    Important problems in load cells are creep and hysteresis. Expensive high grade steels are used in order to reduce these effects. In this paper a silicon load cell design is presented which is based on a force-to-liquid-pressure transformation. The design is insensitive to hysteresis and creep, can be made at very low costs and is able to measure loads up to 1000 kg with an accuracy of 0.03 %. Analytical, numerical and experimental results on a macroscopic steel load cell are in very close agreement with each other.
    Original languageUndefined
    Title of host publicationProceedings of the Micromechanics Europe 1998 Conference (MME)
    Place of PublicationUlvik, Norway
    Pages260-263
    Publication statusPublished - 3 Jun 1998
    Event9th Micromechanics Europe Workshop, MME 1998 - Ulvik, Norway
    Duration: 3 Jun 19985 Jun 1998
    Conference number: 9

    Conference

    Conference9th Micromechanics Europe Workshop, MME 1998
    Abbreviated titleMME
    CountryNorway
    CityUlvik
    Period3/06/985/06/98

    Keywords

    • METIS-112899
    • IR-16017

    Cite this

    Zwijze, A. F., Wiegerink, R. J., Lammerink, T. S. J., & Elwenspoek, M. C. (1998). Low creep and hysteresis silicon load cell based on a force-to-liquid pressure transformation. In Proceedings of the Micromechanics Europe 1998 Conference (MME) (pp. 260-263). Ulvik, Norway.