Important problems in load cells are creep and hysteresis. Expensive high grade steels are used in order to reduce these effects. In this paper a silicon load cell design is presented which is based on a force-to-liquid-pressure transformation. The design is insensitive to hysteresis and creep, can be made at very low costs and is able to measure loads up to 1000 kg with an accuracy of 0.03 %. Analytical, numerical and experimental results on a macroscopic steel load cell are in very close agreement with each other.
|Title of host publication||Proceedings of the Micromechanics Europe 1998 Conference (MME)|
|Place of Publication||Ulvik, Norway|
|Publication status||Published - 3 Jun 1998|
|Event||9th Micromechanics Europe Workshop, MME 1998 - Ulvik, Norway|
Duration: 3 Jun 1998 → 5 Jun 1998
Conference number: 9
|Conference||9th Micromechanics Europe Workshop, MME 1998|
|Period||3/06/98 → 5/06/98|
Zwijze, A. F., Wiegerink, R. J., Lammerink, T. S. J., & Elwenspoek, M. C. (1998). Low creep and hysteresis silicon load cell based on a force-to-liquid pressure transformation. In Proceedings of the Micromechanics Europe 1998 Conference (MME) (pp. 260-263). Ulvik, Norway.