Low creep and hysteresis silicon load cell based on a force-to-liquid pressure transformation

A.F. Zwijze; Remco J. Wiegerink; Theodorus S.J. Lammerink; Michael Curt Elwenspoek

Low creep and hysteresis silicon load cell based on a force-to-liquid pressure transformation

A.F. Zwijze, Remco J. Wiegerink, Theodorus S.J. Lammerink, Michael Curt Elwenspoek

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

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Abstract

Important problems in load cells are creep and hysteresis. Expensive high grade steels are used in order to reduce these effects. In this paper a silicon load cell design is presented which is based on a force-to-liquid-pressure transformation. The design is insensitive to hysteresis and creep, can be made at very low costs and is able to measure loads up to 1000 kg with an accuracy of 0.03 %. Analytical, numerical and experimental results on a macroscopic steel load cell are in very close agreement with each other.

Original language	Undefined
Title of host publication	Proceedings of the Micromechanics Europe 1998 Conference (MME)
Place of Publication	Ulvik, Norway
Pages	260-263
Publication status	Published - 3 Jun 1998
Event	9th Micromechanics Europe Workshop, MME 1998 - Ulvik, Norway Duration: 3 Jun 1998 → 5 Jun 1998 Conference number: 9

Conference

Conference	9th Micromechanics Europe Workshop, MME 1998
Abbreviated title	MME
Country/Territory	Norway
City	Ulvik
Period	3/06/98 → 5/06/98

Keywords

METIS-112899
IR-16017

Access to Document

Zwijze98low1

Cite this

@inproceedings{5ccacea66d2444ad9a740645f6c2cbca,

title = "Low creep and hysteresis silicon load cell based on a force-to-liquid pressure transformation",

abstract = "Important problems in load cells are creep and hysteresis. Expensive high grade steels are used in order to reduce these effects. In this paper a silicon load cell design is presented which is based on a force-to-liquid-pressure transformation. The design is insensitive to hysteresis and creep, can be made at very low costs and is able to measure loads up to 1000 kg with an accuracy of 0.03 %. Analytical, numerical and experimental results on a macroscopic steel load cell are in very close agreement with each other.",

keywords = "METIS-112899, IR-16017",

author = "A.F. Zwijze and Wiegerink, {Remco J.} and Lammerink, {Theodorus S.J.} and Elwenspoek, {Michael Curt}",

year = "1998",

month = jun,

day = "3",

language = "Undefined",

pages = "260--263",

booktitle = "Proceedings of the Micromechanics Europe 1998 Conference (MME)",

note = "null ; Conference date: 03-06-1998 Through 05-06-1998",

}

Low creep and hysteresis silicon load cell based on a force-to-liquid pressure transformation. / Zwijze, A.F.; Wiegerink, Remco J.; Lammerink, Theodorus S.J. et al.

Proceedings of the Micromechanics Europe 1998 Conference (MME). Ulvik, Norway, 1998. p. 260-263.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

TY - GEN

T1 - Low creep and hysteresis silicon load cell based on a force-to-liquid pressure transformation

AU - Zwijze, A.F.

AU - Wiegerink, Remco J.

AU - Lammerink, Theodorus S.J.

AU - Elwenspoek, Michael Curt

N1 - Conference code: 9

PY - 1998/6/3

Y1 - 1998/6/3

N2 - Important problems in load cells are creep and hysteresis. Expensive high grade steels are used in order to reduce these effects. In this paper a silicon load cell design is presented which is based on a force-to-liquid-pressure transformation. The design is insensitive to hysteresis and creep, can be made at very low costs and is able to measure loads up to 1000 kg with an accuracy of 0.03 %. Analytical, numerical and experimental results on a macroscopic steel load cell are in very close agreement with each other.

AB - Important problems in load cells are creep and hysteresis. Expensive high grade steels are used in order to reduce these effects. In this paper a silicon load cell design is presented which is based on a force-to-liquid-pressure transformation. The design is insensitive to hysteresis and creep, can be made at very low costs and is able to measure loads up to 1000 kg with an accuracy of 0.03 %. Analytical, numerical and experimental results on a macroscopic steel load cell are in very close agreement with each other.

KW - METIS-112899

KW - IR-16017

M3 - Conference contribution

SP - 260

EP - 263

BT - Proceedings of the Micromechanics Europe 1998 Conference (MME)

CY - Ulvik, Norway

Y2 - 3 June 1998 through 5 June 1998

ER -