Low-Drift flow sensor with zero-offset thermopile-based power feedback

M. Dijkstra; T.S.J. Lammerink; M.J. de Boer; J.W. Berenschot; R.J. Wiegerink; M. Elwenspoek

doi:10.1109/DTIP.2008.4752993

Low-Drift flow sensor with zero-offset thermopile-based power feedback

M. Dijkstra, T.S.J. Lammerink, M.J. de Boer, J.W. Berenschot, R.J. Wiegerink, M. Elwenspoek

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

14 Citations (Scopus)

120 Downloads (Pure)

Abstract

A thermal flow sensor has been realised consisting of freely-suspended silicon-rich silicon-nitride microchannels with an integrated Al/poly-Si++ thermopile in combination with up- and downstream Al heater resistors. The inherently zero offset of the thermopile is exploited in a feedback loop controlling the dissipated power in the heater resistors, eliminating inevitable influences of resistance drift and mismatch of the thin-film metal resistors. The control system cancels the flow-induced temperature difference across the thermopile by controlling a power difference between both heater resistors, thereby giving a measure for the flow rate. The flow sensor was characterised for power difference versus water flow rates up to 1.5 μl·min-1, being in good agreement with a thermal model of the sensor, and the correct low-drift operation of the temperature-balancing control system has been verified.

Original language	English
Title of host publication	Collection of papers presented at the DTIP of MEMS & MOEMS
Subtitle of host publication	Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS: 9-11 April 2008, Nice, France
Editors	Victor M. Bright
Publisher	EDA Publisher
Number of pages	4
ISBN (Print)	978-2-35500-006-5
DOIs	https://doi.org/10.1109/DTIP.2008.4752993
Publication status	Published - 9 Apr 2008
Event	2008 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2008 - Nice, France Duration: 9 Apr 2008 → 11 Apr 2008

Conference

Conference	2008 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2008
Abbreviated title	DTIP
Country/Territory	France
City	Nice
Period	9/04/08 → 11/04/08

Keywords

TST-SENSORS

Access to Document

10.1109/DTIP.2008.4752993

Dijkstra2008low-driftFinal published version, 2.21 MB

Cite this

Dijkstra, M., Lammerink, T. S. J., de Boer, M. J., Berenschot, J. W., Wiegerink, R. J., & Elwenspoek, M. (2008). Low-Drift flow sensor with zero-offset thermopile-based power feedback. In V. M. Bright (Ed.), Collection of papers presented at the DTIP of MEMS & MOEMS: Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS: 9-11 April 2008, Nice, France EDA Publisher. https://doi.org/10.1109/DTIP.2008.4752993

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title = "Low-Drift flow sensor with zero-offset thermopile-based power feedback",

abstract = "A thermal flow sensor has been realised consisting of freely-suspended silicon-rich silicon-nitride microchannels with an integrated Al/poly-Si++ thermopile in combination with up- and downstream Al heater resistors. The inherently zero offset of the thermopile is exploited in a feedback loop controlling the dissipated power in the heater resistors, eliminating inevitable influences of resistance drift and mismatch of the thin-film metal resistors. The control system cancels the flow-induced temperature difference across the thermopile by controlling a power difference between both heater resistors, thereby giving a measure for the flow rate. The flow sensor was characterised for power difference versus water flow rates up to 1.5 μl·min-1, being in good agreement with a thermal model of the sensor, and the correct low-drift operation of the temperature-balancing control system has been verified.",

keywords = "TST-SENSORS",

author = "M. Dijkstra and T.S.J. Lammerink and {de Boer}, M.J. and J.W. Berenschot and R.J. Wiegerink and M. Elwenspoek",

year = "2008",

month = apr,

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doi = "10.1109/DTIP.2008.4752993",

language = "English",

isbn = "978-2-35500-006-5",

editor = "Bright, {Victor M.}",

booktitle = "Collection of papers presented at the DTIP of MEMS & MOEMS",

publisher = "EDA Publisher",

note = "2008 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2008, DTIP ; Conference date: 09-04-2008 Through 11-04-2008",

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Dijkstra, M, Lammerink, TSJ, de Boer, MJ, Berenschot, JW , Wiegerink, RJ & Elwenspoek, M 2008, Low-Drift flow sensor with zero-offset thermopile-based power feedback. in VM Bright (ed.), Collection of papers presented at the DTIP of MEMS & MOEMS: Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS: 9-11 April 2008, Nice, France. EDA Publisher, 2008 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2008, Nice, France, 9/04/08. https://doi.org/10.1109/DTIP.2008.4752993

Low-Drift flow sensor with zero-offset thermopile-based power feedback. / Dijkstra, M.; Lammerink, T.S.J.; de Boer, M.J. et al.
Collection of papers presented at the DTIP of MEMS & MOEMS: Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS: 9-11 April 2008, Nice, France. ed. / Victor M. Bright. EDA Publisher, 2008.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

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AB - A thermal flow sensor has been realised consisting of freely-suspended silicon-rich silicon-nitride microchannels with an integrated Al/poly-Si++ thermopile in combination with up- and downstream Al heater resistors. The inherently zero offset of the thermopile is exploited in a feedback loop controlling the dissipated power in the heater resistors, eliminating inevitable influences of resistance drift and mismatch of the thin-film metal resistors. The control system cancels the flow-induced temperature difference across the thermopile by controlling a power difference between both heater resistors, thereby giving a measure for the flow rate. The flow sensor was characterised for power difference versus water flow rates up to 1.5 μl·min-1, being in good agreement with a thermal model of the sensor, and the correct low-drift operation of the temperature-balancing control system has been verified.

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Dijkstra M, Lammerink TSJ, de Boer MJ, Berenschot JW , Wiegerink RJ, Elwenspoek M. Low-Drift flow sensor with zero-offset thermopile-based power feedback. In Bright VM, editor, Collection of papers presented at the DTIP of MEMS & MOEMS: Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS: 9-11 April 2008, Nice, France. EDA Publisher. 2008 doi: 10.1109/DTIP.2008.4752993

Low-Drift flow sensor with zero-offset thermopile-based power feedback

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