Low-Drift flow sensor with zero-offset thermopile-based power feedback

M. Dijkstra, T.S.J. Lammerink, M.J. de Boer, J.W. Berenschot, R.J. Wiegerink, M. Elwenspoek

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

    13 Citations (Scopus)
    69 Downloads (Pure)

    Abstract

    A thermal flow sensor has been realised consisting of freely-suspended silicon-rich silicon-nitride microchannels with an integrated Al/poly-Si++ thermopile in combination with up- and downstream Al heater resistors. The inherently zero offset of the thermopile is exploited in a feedback loop controlling the dissipated power in the heater resistors, eliminating inevitable influences of resistance drift and mismatch of the thin-film metal resistors. The control system cancels the flow-induced temperature difference across the thermopile by controlling a power difference between both heater resistors, thereby giving a measure for the flow rate. The flow sensor was characterised for power difference versus water flow rates up to 1.5 μl·min-1, being in good agreement with a thermal model of the sensor, and the correct low-drift operation of the temperature-balancing control system has been verified.
    Original languageEnglish
    Title of host publicationCollection of papers presented at the DTIP of MEMS & MOEMS
    Subtitle of host publicationSymposium on Design, Test, Integration and Packaging of MEMS/MOEMS: 9-11 April 2008, Nice, France
    EditorsVictor M. Bright
    PublisherEDA Publisher
    Number of pages4
    ISBN (Print)978-2-35500-006-5
    DOIs
    Publication statusPublished - 9 Apr 2008
    Event2008 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2008 - Nice, France
    Duration: 9 Apr 200811 Apr 2008

    Conference

    Conference2008 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2008
    Abbreviated titleDTIP
    CountryFrance
    CityNice
    Period9/04/0811/04/08

    Keywords

    • TST-SENSORS

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  • Cite this

    Dijkstra, M., Lammerink, T. S. J., de Boer, M. J., Berenschot, J. W., Wiegerink, R. J., & Elwenspoek, M. (2008). Low-Drift flow sensor with zero-offset thermopile-based power feedback. In V. M. Bright (Ed.), Collection of papers presented at the DTIP of MEMS & MOEMS: Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS: 9-11 April 2008, Nice, France EDA Publisher. https://doi.org/10.1109/DTIP.2008.4752993