Low flow Coriolis flow controller with piezo operated control valve

M.R. Katerberg, G.H.J.M. Ratering, T.H. Platenkamp, J.W. van de Geest, S. Klein Hesselink, Joost Conrad Lötters

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    We developed a compact conventional steel tube Coriolis mass flow controller for low flow rates down to 10mg/min and up to 3g/min in one instrument. The mechanical construction of the flow controller has been optimized to have a low internal dead volume for control speed and stability. An on board piezo actuated control valve is used as actuator to control the flow. The advantage of this valve principle is the lack of internal volume, high stiffness and very little self-heating. A dedicated setup is used to validate the performance of the Coriolis flow controller. The instrument is capable of controlling 30mg/min over 25hrs within 1% peak to peak of reading. Due to the small internal volume and stiffness of the actuator the flow controller response time within 1% accuracy is <6s on the reference. On different liquids the flow controller shows an accuracy of better than 0.1mg/min ± 0.2% of reading.
    Original languageUndefined
    Title of host publicationProceedings of the Second International Conference on Microfluidic Handling Systems
    Place of PublicationFreiburg, Germany
    PublisherUniversity of Freiburg
    Number of pages4
    ISBN (Print)not assigned
    Publication statusPublished - 8 Oct 2014
    Event2nd International Conference on MicroFluidic Handling Systems, MFHS 2014 - Freiburg, Germany
    Duration: 8 Oct 201410 Oct 2014
    Conference number: 2

    Publication series

    PublisherUniversity of Freiburg


    Conference2nd International Conference on MicroFluidic Handling Systems, MFHS 2014
    Abbreviated titleMFHS
    Internet address


    • EWI-25455
    • METIS-309743
    • IR-93295

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