Low Frequency Noise in Boron Doped Polycrystalline SiGe Thin Film Resistors

X.Y. Chen, Cora Salm, A.D. van Rheenen

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

Keywords

@inproceedings{eefbf33003f5417ea5b4ef7909d46460,

title = "Low Frequency Noise in Boron Doped Polycrystalline SiGe Thin Film Resistors",

keywords = "METIS-113836",

author = "X.Y. Chen and Cora Salm and {van Rheenen}, A.D.",

year = "1998",

month = dec,

day = "20",

language = "Undefined",

pages = "242--243",

booktitle = "Proceedings of IEDMS'98",

}