Low-loss Al2O3 waveguides for active integrated optics

Kerstin Worhoff, J. Bradley, F. Ay, Markus Pollnau

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

    Abstract

    Reactively co-sputtered amorphous aluminum oxide layers with low loss (0.11 dB/cm at NIR wavelength) have been fabricated. Channel waveguides with steep, smooth side walls have been etched by a dry process.
    Original languageUndefined
    Title of host publicationTechnical Digest Conference on Lasers and Electro-Optics, CLEO 2007
    Place of PublicationWashington DC, U.S.A.
    PublisherOptical Society of America
    PagesCMW5
    Number of pages2
    ISBN (Print)1-55752-834-9
    Publication statusPublished - May 2007
    EventConference on Lasers and Electro-Optics, CLEO/QELS 2007 - Baltimore, United States
    Duration: 6 May 200711 May 2007

    Publication series

    Name
    PublisherOptical Society of America
    Number67310A

    Conference

    ConferenceConference on Lasers and Electro-Optics, CLEO/QELS 2007
    Abbreviated titleCLEO/QELS
    CountryUnited States
    CityBaltimore
    Period6/05/0711/05/07

    Keywords

    • IOMS-APD: Active Photonic Devices
    • EWI-11637
    • METIS-245892
    • IR-62080
    • EC Grant Agreement nr.: FP6/017501

    Cite this

    Worhoff, K., Bradley, J., Ay, F., & Pollnau, M. (2007). Low-loss Al2O3 waveguides for active integrated optics. In Technical Digest Conference on Lasers and Electro-Optics, CLEO 2007 (pp. CMW5). Washington DC, U.S.A.: Optical Society of America.