Low-loss Al2O3 waveguides for active integrated optics

Kerstin Worhoff; J. Bradley; F. Ay; Markus Pollnau

Low-loss Al₂O₃ waveguides for active integrated optics

Kerstin Worhoff, J. Bradley, F. Ay, Markus Pollnau

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

Abstract

Reactively co-sputtered amorphous aluminum oxide layers with low loss (0.11 dB/cm at NIR wavelength) have been fabricated. Channel waveguides with steep, smooth side walls have been etched by a dry process.

Original language	Undefined
Title of host publication	Technical Digest Conference on Lasers and Electro-Optics, CLEO 2007
Place of Publication	Washington DC, U.S.A.
Publisher	Optical Society of America
Pages	CMW5
Number of pages	2
ISBN (Print)	1-55752-834-9
Publication status	Published - May 2007
Event	Conference on Lasers and Electro-Optics, CLEO/QELS 2007 - Baltimore, United States Duration: 6 May 2007 → 11 May 2007

Publication series

Name
Publisher	Optical Society of America
Number	67310A

Conference

Conference	Conference on Lasers and Electro-Optics, CLEO/QELS 2007
Abbreviated title	CLEO/QELS
Country	United States
City	Baltimore
Period	6/05/07 → 11/05/07

Keywords

IOMS-APD: Active Photonic Devices
EWI-11637
METIS-245892
IR-62080
EC Grant Agreement nr.: FP6/017501

Cite this

Worhoff, K., Bradley, J., Ay, F., & Pollnau, M. (2007). Low-loss Al₂O₃ waveguides for active integrated optics. In Technical Digest Conference on Lasers and Electro-Optics, CLEO 2007 (pp. CMW5). Washington DC, U.S.A.: Optical Society of America.

@inproceedings{3dd3cdac2f714fedb5cbd2cff03a1178,

title = "Low-loss Al2O3 waveguides for active integrated optics",

abstract = "Reactively co-sputtered amorphous aluminum oxide layers with low loss (0.11 dB/cm at NIR wavelength) have been fabricated. Channel waveguides with steep, smooth side walls have been etched by a dry process.",

keywords = "IOMS-APD: Active Photonic Devices, EWI-11637, METIS-245892, IR-62080, EC Grant Agreement nr.: FP6/017501",

author = "Kerstin Worhoff and J. Bradley and F. Ay and Markus Pollnau",

year = "2007",

month = "5",

language = "Undefined",

isbn = "1-55752-834-9",

publisher = "Optical Society of America",

number = "67310A",

pages = "CMW5",

booktitle = "Technical Digest Conference on Lasers and Electro-Optics, CLEO 2007",

address = "United States",

}

TY - GEN

T1 - Low-loss Al2O3 waveguides for active integrated optics

AU - Worhoff, Kerstin

AU - Bradley, J.

AU - Ay, F.

AU - Pollnau, Markus

PY - 2007/5

Y1 - 2007/5

N2 - Reactively co-sputtered amorphous aluminum oxide layers with low loss (0.11 dB/cm at NIR wavelength) have been fabricated. Channel waveguides with steep, smooth side walls have been etched by a dry process.

AB - Reactively co-sputtered amorphous aluminum oxide layers with low loss (0.11 dB/cm at NIR wavelength) have been fabricated. Channel waveguides with steep, smooth side walls have been etched by a dry process.

KW - IOMS-APD: Active Photonic Devices

KW - EWI-11637

KW - METIS-245892

KW - IR-62080

KW - EC Grant Agreement nr.: FP6/017501

M3 - Conference contribution

SN - 1-55752-834-9

SP - CMW5

BT - Technical Digest Conference on Lasers and Electro-Optics, CLEO 2007

PB - Optical Society of America

CY - Washington DC, U.S.A.

ER -

Access to Document

http://eprints.eemcs.utwente.nl/secure2/11637/01/Worhoff_K._Technical_Digest_CLEO_07_Baltimore_Maryland_USA_Paper_CMW5.pdf