@inproceedings{3dd3cdac2f714fedb5cbd2cff03a1178,
title = "Low-loss Al2O3 waveguides for active integrated optics",
abstract = "Reactively co-sputtered amorphous aluminum oxide layers with low loss (0.11 dB/cm at NIR wavelength) have been fabricated. Channel waveguides with steep, smooth side walls have been etched by a dry process.",
keywords = "IOMS-APD: Active Photonic Devices, EWI-11637, METIS-245892, IR-62080, EC Grant Agreement nr.: FP6/017501",
author = "Kerstin Worhoff and J. Bradley and F. Ay and Markus Pollnau",
year = "2007",
month = may,
language = "Undefined",
isbn = "1-55752-834-9",
publisher = "Optical Society of America",
number = "67310A",
pages = "CMW5",
booktitle = "Technical Digest Conference on Lasers and Electro-Optics, CLEO 2007",
address = "United States",
note = "null ; Conference date: 06-05-2007 Through 11-05-2007",
}