Reactively co-sputtered amorphous aluminum oxide layers with low loss (0.11 dB/cm at NIR wavelength) have been fabricated. Channel waveguides with steep, smooth side walls have been etched by a dry process.
|Publisher||Optical Society of America|
|Conference||Conference on Lasers and Electro-Optics, CLEO/QELS 2007|
|Period||6/05/07 → 11/05/07|
- IOMS-APD: Active Photonic Devices
- EC Grant Agreement nr.: FP6/017501