Low loss, high contrast optical waveguides based on CMOS compatible LPCVD processing

Rene Heideman, D.H. Geuzebroek, Arne Leinse, A. Melloni, F. Morichetti, C.G.H. Roeloffzen, Arjan Meijerink, L. Zhuang, Wim van Etten, E.J. Klein, A. Driessen

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

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    Abstract

    A new class of integrated optical waveguide structures is presented, based on low cost CMOS compatible LPCVD processing. This technology allows for medium and high index contrast waveguides with very low channel attenuation. The geometry is basically formed by a rectangular cross-section silicon nitride $(Si_{3}N_{4})$ filled with and encapsulated by silicon dioxide $(SiO_{2})$. The birefringence and minimal bend radius of the waveguide is completely controlled by the geometry of the waveguide layer structures. Experiments on typical geometries will be presented, showing excellent characteristics (channel attenuation ≤0.06 dB/cm, IL ≤0.6 dB, PDL ≤0.2 dB, Bg «1 x $10^{-3}$, bend radius ≤500 μm).
    Original languageUndefined
    Title of host publicationProceedings European Conference on Integrated Optics (ECIO)
    Place of PublicationCopenhagen, Denmark
    PublisherTechnical University of Denmark
    PagesWB0-42
    Number of pages6
    ISBN (Print)not assigned
    Publication statusPublished - 27 Apr 2007
    Event13th European Conference on Integrated Optics, ECIO 2007 - Copenhagen, Netherlands
    Duration: 25 Apr 200727 Apr 2007
    Conference number: 13

    Publication series

    Name
    PublisherTechnical University of Denmark
    NumberLNCS4549

    Conference

    Conference13th European Conference on Integrated Optics, ECIO 2007
    Abbreviated titleECIO
    CountryNetherlands
    CityCopenhagen
    Period25/04/0727/04/07

    Keywords

    • IOMS-PIT: PHOTONICS INTEGRATION TECHNOLOGY
    • METIS-241948
    • EWI-11138
    • IR-64378

    Cite this

    Heideman, R., Geuzebroek, D. H., Leinse, A., Melloni, A., Morichetti, F., Roeloffzen, C. G. H., ... Driessen, A. (2007). Low loss, high contrast optical waveguides based on CMOS compatible LPCVD processing. In Proceedings European Conference on Integrated Optics (ECIO) (pp. WB0-42). Copenhagen, Denmark: Technical University of Denmark.
    Heideman, Rene ; Geuzebroek, D.H. ; Leinse, Arne ; Melloni, A. ; Morichetti, F. ; Roeloffzen, C.G.H. ; Meijerink, Arjan ; Zhuang, L. ; van Etten, Wim ; Klein, E.J. ; Driessen, A. / Low loss, high contrast optical waveguides based on CMOS compatible LPCVD processing. Proceedings European Conference on Integrated Optics (ECIO). Copenhagen, Denmark : Technical University of Denmark, 2007. pp. WB0-42
    @inproceedings{b4d952d41570439fa9e057618be42f67,
    title = "Low loss, high contrast optical waveguides based on CMOS compatible LPCVD processing",
    abstract = "A new class of integrated optical waveguide structures is presented, based on low cost CMOS compatible LPCVD processing. This technology allows for medium and high index contrast waveguides with very low channel attenuation. The geometry is basically formed by a rectangular cross-section silicon nitride $(Si_{3}N_{4})$ filled with and encapsulated by silicon dioxide $(SiO_{2})$. The birefringence and minimal bend radius of the waveguide is completely controlled by the geometry of the waveguide layer structures. Experiments on typical geometries will be presented, showing excellent characteristics (channel attenuation ≤0.06 dB/cm, IL ≤0.6 dB, PDL ≤0.2 dB, Bg «1 x $10^{-3}$, bend radius ≤500 μm).",
    keywords = "IOMS-PIT: PHOTONICS INTEGRATION TECHNOLOGY, METIS-241948, EWI-11138, IR-64378",
    author = "Rene Heideman and D.H. Geuzebroek and Arne Leinse and A. Melloni and F. Morichetti and C.G.H. Roeloffzen and Arjan Meijerink and L. Zhuang and {van Etten}, Wim and E.J. Klein and A. Driessen",
    year = "2007",
    month = "4",
    day = "27",
    language = "Undefined",
    isbn = "not assigned",
    publisher = "Technical University of Denmark",
    number = "LNCS4549",
    pages = "WB0--42",
    booktitle = "Proceedings European Conference on Integrated Optics (ECIO)",

    }

    Heideman, R, Geuzebroek, DH, Leinse, A, Melloni, A, Morichetti, F, Roeloffzen, CGH, Meijerink, A, Zhuang, L, van Etten, W, Klein, EJ & Driessen, A 2007, Low loss, high contrast optical waveguides based on CMOS compatible LPCVD processing. in Proceedings European Conference on Integrated Optics (ECIO). Technical University of Denmark, Copenhagen, Denmark, pp. WB0-42, 13th European Conference on Integrated Optics, ECIO 2007, Copenhagen, Netherlands, 25/04/07.

    Low loss, high contrast optical waveguides based on CMOS compatible LPCVD processing. / Heideman, Rene; Geuzebroek, D.H.; Leinse, Arne; Melloni, A.; Morichetti, F.; Roeloffzen, C.G.H.; Meijerink, Arjan; Zhuang, L.; van Etten, Wim; Klein, E.J.; Driessen, A.

    Proceedings European Conference on Integrated Optics (ECIO). Copenhagen, Denmark : Technical University of Denmark, 2007. p. WB0-42.

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

    TY - GEN

    T1 - Low loss, high contrast optical waveguides based on CMOS compatible LPCVD processing

    AU - Heideman, Rene

    AU - Geuzebroek, D.H.

    AU - Leinse, Arne

    AU - Melloni, A.

    AU - Morichetti, F.

    AU - Roeloffzen, C.G.H.

    AU - Meijerink, Arjan

    AU - Zhuang, L.

    AU - van Etten, Wim

    AU - Klein, E.J.

    AU - Driessen, A.

    PY - 2007/4/27

    Y1 - 2007/4/27

    N2 - A new class of integrated optical waveguide structures is presented, based on low cost CMOS compatible LPCVD processing. This technology allows for medium and high index contrast waveguides with very low channel attenuation. The geometry is basically formed by a rectangular cross-section silicon nitride $(Si_{3}N_{4})$ filled with and encapsulated by silicon dioxide $(SiO_{2})$. The birefringence and minimal bend radius of the waveguide is completely controlled by the geometry of the waveguide layer structures. Experiments on typical geometries will be presented, showing excellent characteristics (channel attenuation ≤0.06 dB/cm, IL ≤0.6 dB, PDL ≤0.2 dB, Bg «1 x $10^{-3}$, bend radius ≤500 μm).

    AB - A new class of integrated optical waveguide structures is presented, based on low cost CMOS compatible LPCVD processing. This technology allows for medium and high index contrast waveguides with very low channel attenuation. The geometry is basically formed by a rectangular cross-section silicon nitride $(Si_{3}N_{4})$ filled with and encapsulated by silicon dioxide $(SiO_{2})$. The birefringence and minimal bend radius of the waveguide is completely controlled by the geometry of the waveguide layer structures. Experiments on typical geometries will be presented, showing excellent characteristics (channel attenuation ≤0.06 dB/cm, IL ≤0.6 dB, PDL ≤0.2 dB, Bg «1 x $10^{-3}$, bend radius ≤500 μm).

    KW - IOMS-PIT: PHOTONICS INTEGRATION TECHNOLOGY

    KW - METIS-241948

    KW - EWI-11138

    KW - IR-64378

    M3 - Conference contribution

    SN - not assigned

    SP - WB0-42

    BT - Proceedings European Conference on Integrated Optics (ECIO)

    PB - Technical University of Denmark

    CY - Copenhagen, Denmark

    ER -

    Heideman R, Geuzebroek DH, Leinse A, Melloni A, Morichetti F, Roeloffzen CGH et al. Low loss, high contrast optical waveguides based on CMOS compatible LPCVD processing. In Proceedings European Conference on Integrated Optics (ECIO). Copenhagen, Denmark: Technical University of Denmark. 2007. p. WB0-42