Low-loss, high-index-contrast Si3N4SiO2 optical waveguides for optical delay lines in microwave photonics signal processing

Leimeng Zhuang, David Marpaung, Maurizio Burla, Willem Beeker, Arne Leinse, Chris Roeloffzen

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    Abstract

    We report the design and characterization of Si3N4/SiO2 optical waveguides which are specifically developed for optical delay lines in microwave photonics (MWP) signal processing applications. The waveguide structure consists of a stack of two Si3N4 stripes and SiO2 as an intermediate layer. Characterization of the waveguide propagation loss was performed in race track-shaped optical ring resonators (ORRs) with a free-spectral range of 20 GHz and a bending radius varied from 50 μm to 125 μm. A waveguide propagation loss as low as 0.095 dB/cm was measured in the ORRs with bend radii ≥ 70 μm. Using the waveguide technology two types of RF-modulated optical sideband filters with high sideband suppression and small transition band consisting of an Mach-Zehnder interferometer and ORRs are also demonstrated. These results demonstrate the potential of the waveguide technology to be applied to construct compact on-chip MWP signal processors.
    Original languageEnglish
    Pages (from-to)23162-23170
    Number of pages9
    JournalOptics express
    Volume19
    Issue number23
    DOIs
    Publication statusPublished - 31 Oct 2011

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