Low-loss photonic integrated circuits for UV applications

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We present a low propagation loss aluminium oxide integrated photonics platform enabling applications with operation down to the UV wavelength range (i.e., <250 nm). Single mode fully etched waveguides were fabricated with losses below 2 dB/cm at 405 nm. The influence of waveguide dimensions on the propagation losses are presented, indicating that losses are sidewall roughness limited. Lower losses can be achieved by further optimization of the cross-section of the waveguides. In this presentation, the aluminium oxide platform will be introduced together with the characterization of the waveguides at near-UV wavelengths.
Original languageEnglish
Title of host publicationIntegrated Optics
Subtitle of host publicationDevices, Materials, and Technologies XXVII
EditorsSonia M. Garcia-Blanco, Pavel Cheben
Number of pages5
ISBN (Electronic)9781510659537
Publication statusPublished - 17 Mar 2023
EventSPIE Optoelectronics and Photonic Materials and Devices Conference, OPTO 2023 - San Francisco, United States
Duration: 28 Jan 20233 Feb 2023


ConferenceSPIE Optoelectronics and Photonic Materials and Devices Conference, OPTO 2023
Abbreviated titleOPTO 2023
Country/TerritoryUnited States
CitySan Francisco


  • Aluminium oxide
  • PIC
  • UV
  • Low loss
  • Refractive index
  • Ultraviolet
  • 2023 OA procedure


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