Low-loss photonic integrated circuits for UV applications

W.A.P.M. Hendriks; M. Dijkstra; S. Mardani; I. Hegeman; Sonia García Blanco

doi:10.1117/12.2657143

Low-loss photonic integrated circuits for UV applications

W.A.P.M. Hendriks, M. Dijkstra, S. Mardani, I. Hegeman, Sonia García Blanco

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

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Abstract

We present a low propagation loss aluminium oxide integrated photonics platform enabling applications with operation down to the UV wavelength range (i.e., <250 nm). Single mode fully etched waveguides were fabricated with losses below 2 dB/cm at 405 nm. The influence of waveguide dimensions on the propagation losses are presented, indicating that losses are sidewall roughness limited. Lower losses can be achieved by further optimization of the cross-section of the waveguides. In this presentation, the aluminium oxide platform will be introduced together with the characterization of the waveguides at near-UV wavelengths.

Original language	English
Title of host publication	Integrated Optics
Subtitle of host publication	Devices, Materials, and Technologies XXVII
Editors	Sonia M. Garcia-Blanco, Pavel Cheben
Publisher	SPIE
Number of pages	5
Volume	12424
ISBN (Electronic)	9781510659537
DOIs	https://doi.org/10.1117/12.2657143
Publication status	Published - 17 Mar 2023
Event	SPIE Optoelectronics and Photonic Materials and Devices Conference, OPTO 2023 - San Francisco, United States Duration: 28 Jan 2023 → 3 Feb 2023

Conference

Conference	SPIE Optoelectronics and Photonic Materials and Devices Conference, OPTO 2023
Abbreviated title	OPTO 2023
Country/Territory	United States
City	San Francisco
Period	28/01/23 → 3/02/23

Keywords

Aluminium oxide
PIC
UV
Low loss
Refractive index
Ultraviolet
2023 OA procedure

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10.1117/12.2657143

1242402Final published version, 545 KBLicence: Taverne

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title = "Low-loss photonic integrated circuits for UV applications",

abstract = "We present a low propagation loss aluminium oxide integrated photonics platform enabling applications with operation down to the UV wavelength range (i.e., <250 nm). Single mode fully etched waveguides were fabricated with losses below 2 dB/cm at 405 nm. The influence of waveguide dimensions on the propagation losses are presented, indicating that losses are sidewall roughness limited. Lower losses can be achieved by further optimization of the cross-section of the waveguides. In this presentation, the aluminium oxide platform will be introduced together with the characterization of the waveguides at near-UV wavelengths.",

keywords = "Aluminium oxide, PIC, UV, Low loss, Refractive index, Ultraviolet, 2023 OA procedure",

author = "W.A.P.M. Hendriks and M. Dijkstra and S. Mardani and I. Hegeman and {Garc{\'i}a Blanco}, Sonia",

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Hendriks, WAPM , Dijkstra, M , Mardani, S, Hegeman, I & García Blanco, S 2023, Low-loss photonic integrated circuits for UV applications. in SM Garcia-Blanco & P Cheben (eds), Integrated Optics: Devices, Materials, and Technologies XXVII. vol. 12424, 1242402, SPIE, SPIE Optoelectronics and Photonic Materials and Devices Conference, OPTO 2023, San Francisco, California, United States, 28/01/23. https://doi.org/10.1117/12.2657143

Low-loss photonic integrated circuits for UV applications. / Hendriks, W.A.P.M.; Dijkstra, M.; Mardani, S. et al.
Integrated Optics: Devices, Materials, and Technologies XXVII. ed. / Sonia M. Garcia-Blanco; Pavel Cheben. Vol. 12424 SPIE, 2023. 1242402.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

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T1 - Low-loss photonic integrated circuits for UV applications

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AU - Dijkstra, M.

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AU - García Blanco, Sonia

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AB - We present a low propagation loss aluminium oxide integrated photonics platform enabling applications with operation down to the UV wavelength range (i.e., <250 nm). Single mode fully etched waveguides were fabricated with losses below 2 dB/cm at 405 nm. The influence of waveguide dimensions on the propagation losses are presented, indicating that losses are sidewall roughness limited. Lower losses can be achieved by further optimization of the cross-section of the waveguides. In this presentation, the aluminium oxide platform will be introduced together with the characterization of the waveguides at near-UV wavelengths.

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KW - PIC

KW - UV

KW - Low loss

KW - Refractive index

KW - Ultraviolet

KW - 2023 OA procedure

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ER -

Low-loss photonic integrated circuits for UV applications

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Keywords

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