@inproceedings{38a739f10c074edab4d3c685ba7e8aca,
title = "Low-loss reactive sputter deposited titanium oxide waveguides",
abstract = "In this work, the fabrication process of optical channel waveguides in titanium dioxide is optimized, including the sputter deposition of titanium dioxide, the reflow of the electron-beam resist and annealing of the etched waveguides. The propagation losses of the films and fully etched strip waveguides had values below 1 dB/cm at wavelengths above 633 nm with propagation losses as low as 0.5 dB/cm at 1550 nm.",
keywords = "Amorphous, Anatase, Low Loss, Sputtering, Titanium Dioxide, Waveguide, 22/2 OA procedure",
author = "Alvaro Aguirre-Fontenla and Ivo Hegeman and Hendriks, {Ward A.P.M.} and Meindert Dijkstra and Blanco, {Sonia M.Garcia}",
note = "Publisher Copyright: {\textcopyright} 2021 IEEE.; 2021 IEEE 17th International Conference on Group IV Photonics (GFP) ; Conference date: 07-12-2021 Through 10-12-2021",
year = "2022",
month = jan,
day = "20",
doi = "10.1109/GFP51802.2021.9673908",
language = "English",
series = "IEEE International Conference on Group IV Photonics GFP",
publisher = "IEEE",
booktitle = "2021 IEEE 17th International Conference on Group IV Photonics, GFP 2021 - Proceedings",
address = "United States",
}