@inproceedings{b6554106c04c435a8a1335e8922c66ac,
title = "Low-loss rib waveguides in Al2O3 layers for active integrated optical devices",
abstract = "A method for deposition of aluminum oxide layers with low optical loss (0.11 dB/cm at 1523 nm) has been developed. Low-loss rib waveguides have been fabricated in such layers using a dry-etching process.",
keywords = "IOMS-APD: Active Photonic Devices, IR-62023, METIS-245787, EWI-11425",
author = "J. Bradley and F. Ay and Kerstin Worhoff and Markus Pollnau",
year = "2007",
month = jun,
doi = "10.1109/CLEOE-IQEC.2007.4386203",
language = "Undefined",
isbn = "1-42440931-4",
publisher = "European Physical Society (EPS)",
number = "FS-07-05",
pages = "CE7--6",
booktitle = "Digest of the Conference on Lasers and Electro-Optics Europe (CLEO/Europe-IQEC 2007)",
address = "France",
note = "null ; Conference date: 17-06-2007 Through 22-06-2007",
}