Low-loss rib waveguides in Al2O3 layers for active integrated optical devices

J. Bradley, F. Ay, Kerstin Worhoff, Markus Pollnau

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

    Abstract

    A method for deposition of aluminum oxide layers with low optical loss (0.11 dB/cm at 1523 nm) has been developed. Low-loss rib waveguides have been fabricated in such layers using a dry-etching process.
    Original languageUndefined
    Title of host publicationDigest of the Conference on Lasers and Electro-Optics Europe (CLEO/Europe-IQEC 2007)
    PublisherEuropean Physical Society (EPS)
    PagesCE7-6
    Number of pages1
    ISBN (Print)1-42440931-4
    DOIs
    Publication statusPublished - Jun 2007
    EventEuropean Conference on Lasers and Electro-Optics and the International Quantum Electronics Conference 2007 - International Congress Centre Munich, Munich, Germany
    Duration: 17 Jun 200722 Jun 2007

    Publication series

    Name
    PublisherEuropean Physical Society
    NumberFS-07-05

    Conference

    ConferenceEuropean Conference on Lasers and Electro-Optics and the International Quantum Electronics Conference 2007
    Abbreviated titleCLEO/Europe IQEC
    CountryGermany
    CityMunich
    Period17/06/0722/06/07

    Keywords

    • IOMS-APD: Active Photonic Devices
    • IR-62023
    • METIS-245787
    • EWI-11425

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