Low-loss rib waveguides in Al2O3 layers for active integrated optical devices

J. Bradley; F. Ay; Kerstin Worhoff; Markus Pollnau

doi:10.1109/CLEOE-IQEC.2007.4386203

Low-loss rib waveguides in Al₂O₃ layers for active integrated optical devices

J. Bradley, F. Ay, Kerstin Worhoff, Markus Pollnau

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

Abstract

A method for deposition of aluminum oxide layers with low optical loss (0.11 dB/cm at 1523 nm) has been developed. Low-loss rib waveguides have been fabricated in such layers using a dry-etching process.

Original language	Undefined
Title of host publication	Digest of the Conference on Lasers and Electro-Optics Europe (CLEO/Europe-IQEC 2007)
Publisher	European Physical Society (EPS)
Pages	CE7-6
Number of pages	1
ISBN (Print)	1-42440931-4
DOIs	https://doi.org/10.1109/CLEOE-IQEC.2007.4386203
Publication status	Published - Jun 2007
Event	European Conference on Lasers and Electro-Optics and the International Quantum Electronics Conference 2007 - International Congress Centre Munich, Munich, Germany Duration: 17 Jun 2007 → 22 Jun 2007

Publication series

Name
Publisher	European Physical Society
Number	FS-07-05

Conference

Conference	European Conference on Lasers and Electro-Optics and the International Quantum Electronics Conference 2007
Abbreviated title	CLEO/Europe IQEC
Country/Territory	Germany
City	Munich
Period	17/06/07 → 22/06/07

Keywords

IOMS-APD: Active Photonic Devices
IR-62023
METIS-245787
EWI-11425

Access to Document

10.1109/CLEOE-IQEC.2007.4386203

http://eprints.eemcs.utwente.nl/secure2/11425/01/Bradley_J.D.B._CLEO_Europe_2007_Munich_17-22_June_Paper_CE7-6-THU.pdf

Cite this

@inproceedings{b6554106c04c435a8a1335e8922c66ac,

title = "Low-loss rib waveguides in Al2O3 layers for active integrated optical devices",

abstract = "A method for deposition of aluminum oxide layers with low optical loss (0.11 dB/cm at 1523 nm) has been developed. Low-loss rib waveguides have been fabricated in such layers using a dry-etching process.",

keywords = "IOMS-APD: Active Photonic Devices, IR-62023, METIS-245787, EWI-11425",

author = "J. Bradley and F. Ay and Kerstin Worhoff and Markus Pollnau",

year = "2007",

month = jun,

doi = "10.1109/CLEOE-IQEC.2007.4386203",

language = "Undefined",

isbn = "1-42440931-4",

publisher = "European Physical Society (EPS)",

number = "FS-07-05",

pages = "CE7--6",

booktitle = "Digest of the Conference on Lasers and Electro-Optics Europe (CLEO/Europe-IQEC 2007)",

address = "France",

note = "null ; Conference date: 17-06-2007 Through 22-06-2007",

}

Bradley, J, Ay, F, Worhoff, K & Pollnau, M 2007, Low-loss rib waveguides in Al₂O₃ layers for active integrated optical devices. in Digest of the Conference on Lasers and Electro-Optics Europe (CLEO/Europe-IQEC 2007). European Physical Society (EPS), pp. CE7-6, European Conference on Lasers and Electro-Optics and the International Quantum Electronics Conference 2007, Munich, Bavaria, Germany, 17/06/07. https://doi.org/10.1109/CLEOE-IQEC.2007.4386203

Low-loss rib waveguides in Al₂O₃ layers for active integrated optical devices. / Bradley, J.; Ay, F.; Worhoff, Kerstin; Pollnau, Markus.

Digest of the Conference on Lasers and Electro-Optics Europe (CLEO/Europe-IQEC 2007). European Physical Society (EPS), 2007. p. CE7-6.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

TY - GEN

T1 - Low-loss rib waveguides in Al2O3 layers for active integrated optical devices

AU - Bradley, J.

AU - Ay, F.

AU - Worhoff, Kerstin

AU - Pollnau, Markus

PY - 2007/6

Y1 - 2007/6

N2 - A method for deposition of aluminum oxide layers with low optical loss (0.11 dB/cm at 1523 nm) has been developed. Low-loss rib waveguides have been fabricated in such layers using a dry-etching process.

AB - A method for deposition of aluminum oxide layers with low optical loss (0.11 dB/cm at 1523 nm) has been developed. Low-loss rib waveguides have been fabricated in such layers using a dry-etching process.

KW - IOMS-APD: Active Photonic Devices

KW - IR-62023

KW - METIS-245787

KW - EWI-11425

U2 - 10.1109/CLEOE-IQEC.2007.4386203

DO - 10.1109/CLEOE-IQEC.2007.4386203

M3 - Conference contribution

SN - 1-42440931-4

SP - CE7-6

BT - Digest of the Conference on Lasers and Electro-Optics Europe (CLEO/Europe-IQEC 2007)

PB - European Physical Society (EPS)

Y2 - 17 June 2007 through 22 June 2007

ER -