Fingerprint
Dive into the research topics of 'Low-ohmic contacts by excimer laser annealing of implanted polysilicon'. Together they form a unique fingerprint.- Sort by
- Weight
- Alphabetically
Low-ohmic contacts by excimer laser annealing of implanted polysilicon
Q.W. Ren*, M.R. van den Berg, L.K. Nanver, J. Slabbekoorn, C.C.G. Visser
*Corresponding author for this work
Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review
1
Citation
(Scopus)