Low-power micro-scale CMOS-compatible silicon sensor on a suspended membrane.

Alexeij Y. Kovalgin, J. Holleman, G. Iordache, Antonius J.S.M. Jenneboer, F. Falke, V. Zieren, M.J. Goossens

    Research output: Contribution to conferencePaperpeer-review

    111 Downloads (Pure)


    In this paper we describe a new, simple and cheap silicon device operating at high temperature at a very low power of a few mW. The essential part of the device is a nano-size conductive link 10-100 nm in size (the so-called antifuse) formed in between two poly-silicon electrodes separated by a thin SiO2 layer. The device can be utilized in chemical sensors or chemical micro-reactors requiring high temperature and very low power consumption e.g. in portable, battery operated systems. As a direct application, we mention a gas sensor (i.e. Pellistor) for hydrocarbons (butane, methane, propane, etc.) based on temperature changes due to the catalytic combustion of hydrocarbons. The power consumed by our device is at about 2% of the power consumed by conventional Pellistors.
    Original languageUndefined
    Number of pages11
    Publication statusPublished - 2006
    EventMicrofabricated systems and MEMS VII: 206th ECS Meeting - Honolulu, Hawaii
    Duration: 1 Jan 20041 Jan 2004


    ConferenceMicrofabricated systems and MEMS VII: 206th ECS Meeting


    • IR-67497
    • EWI-15538

    Cite this