Low-Power Micro-Scale CMOS-Compatible Silicon Sensor on a Suspended Membrane, in Microfabricated Systems and MEMS VII

Alexeij Y. Kovalgin, J. Holleman, G. Iordache, Antonius J.S.M. Jenneboer, F. Falke, V. Zieren, M. Goossens

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

    Original languageUndefined
    Title of host publicationProceedings of the International Symposium
    EditorsJ.L. Davidson, P.J. Hesketh, D. Mistra, S. Shoji
    PublisherThe Electrochemical Society Inc.
    Pages173-183
    Number of pages11
    ISBN (Print)1-56677-422-5
    Publication statusPublished - 2004

    Publication series

    Name
    Volume09

    Keywords

    • METIS-218842

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