@inproceedings{99d10af8902d401db62058cc0d57694c,
title = "Low-Power Micro-Scale CMOS-Compatible Silicon Sensor on a Suspended Membrane, in Microfabricated Systems and MEMS VII",
keywords = "METIS-218842",
author = "Kovalgin, {Alexeij Y.} and J. Holleman and G. Iordache and Jenneboer, {Antonius J.S.M.} and F. Falke and V. Zieren and M. Goossens",
year = "2004",
language = "Undefined",
isbn = "1-56677-422-5",
publisher = "The Electrochemical Society Inc.",
pages = "173--183",
editor = "J.L. Davidson and P.J. Hesketh and D. Mistra and S. Shoji",
booktitle = "Proceedings of the International Symposium",
address = "United States",
}