Low-Power Micro-Scale CMOS-Compatible Silicon Sensor on a Suspended Membrane, in Microfabricated Systems and MEMS VII

Alexeij Y. Kovalgin; J. Holleman; G. Iordache; Antonius J.S.M. Jenneboer; F. Falke; V. Zieren; M. Goossens

Low-Power Micro-Scale CMOS-Compatible Silicon Sensor on a Suspended Membrane, in Microfabricated Systems and MEMS VII

Alexeij Y. Kovalgin, J. Holleman, G. Iordache, Antonius J.S.M. Jenneboer, F. Falke, V. Zieren, M. Goossens

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

Original language	Undefined
Title of host publication	Proceedings of the International Symposium
Editors	J.L. Davidson, P.J. Hesketh, D. Mistra, S. Shoji
Publisher	The Electrochemical Society Inc.
Pages	173-183
Number of pages	11
ISBN (Print)	1-56677-422-5
Publication status	Published - 2004

Publication series

Name
Volume	09

Keywords

METIS-218842

Cite this

Kovalgin, A. Y., Holleman, J., Iordache, G., Jenneboer, A. J. S. M., Falke, F., Zieren, V., & Goossens, M. (2004). Low-Power Micro-Scale CMOS-Compatible Silicon Sensor on a Suspended Membrane, in Microfabricated Systems and MEMS VII. In J. L. Davidson, P. J. Hesketh, D. Mistra, & S. Shoji (Eds.), Proceedings of the International Symposium (pp. 173-183). The Electrochemical Society Inc..

Kovalgin, Alexeij Y. ; Holleman, J. ; Iordache, G. ; Jenneboer, Antonius J.S.M. ; Falke, F. ; Zieren, V. ; Goossens, M. / Low-Power Micro-Scale CMOS-Compatible Silicon Sensor on a Suspended Membrane, in Microfabricated Systems and MEMS VII. Proceedings of the International Symposium. editor / J.L. Davidson ; P.J. Hesketh ; D. Mistra ; S. Shoji. The Electrochemical Society Inc., 2004. pp. 173-183

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title = "Low-Power Micro-Scale CMOS-Compatible Silicon Sensor on a Suspended Membrane, in Microfabricated Systems and MEMS VII",

keywords = "METIS-218842",

author = "Kovalgin, {Alexeij Y.} and J. Holleman and G. Iordache and Jenneboer, {Antonius J.S.M.} and F. Falke and V. Zieren and M. Goossens",

year = "2004",

language = "Undefined",

isbn = "1-56677-422-5",

publisher = "The Electrochemical Society Inc.",

pages = "173--183",

editor = "J.L. Davidson and P.J. Hesketh and D. Mistra and S. Shoji",

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Low-Power Micro-Scale CMOS-Compatible Silicon Sensor on a Suspended Membrane, in Microfabricated Systems and MEMS VII. / Kovalgin, Alexeij Y.; Holleman, J.; Iordache, G.; Jenneboer, Antonius J.S.M.; Falke, F.; Zieren, V.; Goossens, M.

Proceedings of the International Symposium. ed. / J.L. Davidson; P.J. Hesketh; D. Mistra; S. Shoji. The Electrochemical Society Inc., 2004. p. 173-183.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

TY - GEN

T1 - Low-Power Micro-Scale CMOS-Compatible Silicon Sensor on a Suspended Membrane, in Microfabricated Systems and MEMS VII

AU - Kovalgin, Alexeij Y.

AU - Holleman, J.

AU - Iordache, G.

AU - Jenneboer, Antonius J.S.M.

AU - Falke, F.

AU - Zieren, V.

AU - Goossens, M.

PY - 2004

Y1 - 2004

KW - METIS-218842

M3 - Conference contribution

SN - 1-56677-422-5

SP - 173

EP - 183

BT - Proceedings of the International Symposium

A2 - Davidson, J.L.

A2 - Hesketh, P.J.

A2 - Mistra, D.

A2 - Shoji, S.

PB - The Electrochemical Society Inc.

ER -