Low-Power Micro-Scale CMOS-Compatible Silicon Sensor on a Suspended Membrane

A.Y. Kovalgin; J. Holleman; G. Iordache; T. Jenneboer; F. Falke; V. Zieren; M. Goossens

Low-Power Micro-Scale CMOS-Compatible Silicon Sensor on a Suspended Membrane

A.Y. Kovalgin, J. Holleman, G. Iordache, T. Jenneboer, F. Falke, V. Zieren, M. Goossens

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

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Abstract

In this paper we describe a new, simple and cheap silicon device operating at high temperature at a very low power of a few mW. The essential part of the device is a nano-size conductive link 10-100 nm in size (the so-called antifuse) formed in between two poly-silicon electrodes separated by a thin SiO2 layer. The device can be utilized in chemical sensors or chemical micro-reactors requiring high temperature and very low power consumption e.g. in portable, battery operated systems. As a direct application, we mention a gas sensor (i.e. Pellistor) for hydrocarbons (butane, methane, propane, etc.) based on temperature changes due to the catalytic combustion of hydrocarbons. The power consumed by our device is at about 2% of the power consumed by conventional Pellistors.

Original language	English
Title of host publication	Microfabricated Systems and MEMS VII : proceedings of the international symposium
Editors	J.L. Davidson, P.J. Hesketh, D. Mistra, S. Shoji
Place of Publication	Pennington, NJ
Publisher	Electrochemical Society
Pages	173-183
Number of pages	11
ISBN (Print)	1-56677-422-5
Publication status	Published - 2004
Event	Microfabricated Systems and MEMS-VII Symposium at the 206th ECS Meeting 2004 - Honolulu, United States Duration: 3 Oct 2004 → 8 Oct 2004 Conference number: 7

Conference

Conference	Microfabricated Systems and MEMS-VII Symposium at the 206th ECS Meeting 2004
Country/Territory	United States
City	Honolulu
Period	3/10/04 → 8/10/04

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Kovalgin, A. Y., Holleman, J., Iordache, G., Jenneboer, T., Falke, F., Zieren, V., & Goossens, M. (2004). Low-Power Micro-Scale CMOS-Compatible Silicon Sensor on a Suspended Membrane. In J. L. Davidson, P. J. Hesketh, D. Mistra, & S. Shoji (Eds.), Microfabricated Systems and MEMS VII : proceedings of the international symposium (pp. 173-183). Electrochemical Society.

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title = "Low-Power Micro-Scale CMOS-Compatible Silicon Sensor on a Suspended Membrane",

abstract = "In this paper we describe a new, simple and cheap silicon device operating at high temperature at a very low power of a few mW. The essential part of the device is a nano-size conductive link 10-100 nm in size (the so-called antifuse) formed in between two poly-silicon electrodes separated by a thin SiO2 layer. The device can be utilized in chemical sensors or chemical micro-reactors requiring high temperature and very low power consumption e.g. in portable, battery operated systems. As a direct application, we mention a gas sensor (i.e. Pellistor) for hydrocarbons (butane, methane, propane, etc.) based on temperature changes due to the catalytic combustion of hydrocarbons. The power consumed by our device is at about 2% of the power consumed by conventional Pellistors.",

author = "A.Y. Kovalgin and J. Holleman and G. Iordache and T. Jenneboer and F. Falke and V. Zieren and M. Goossens",

year = "2004",

language = "English",

isbn = "1-56677-422-5",

pages = "173--183",

editor = "J.L. Davidson and P.J. Hesketh and D. Mistra and S. Shoji",

booktitle = "Microfabricated Systems and MEMS VII : proceedings of the international symposium",

publisher = "Electrochemical Society",

address = "United States",

note = "Microfabricated Systems and MEMS-VII Symposium at the 206th ECS Meeting 2004 ; Conference date: 03-10-2004 Through 08-10-2004",

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Kovalgin, AY, Holleman, J, Iordache, G, Jenneboer, T, Falke, F, Zieren, V & Goossens, M 2004, Low-Power Micro-Scale CMOS-Compatible Silicon Sensor on a Suspended Membrane. in JL Davidson, PJ Hesketh, D Mistra & S Shoji (eds), Microfabricated Systems and MEMS VII : proceedings of the international symposium. Electrochemical Society, Pennington, NJ, pp. 173-183, Microfabricated Systems and MEMS-VII Symposium at the 206th ECS Meeting 2004, Honolulu, Hawaii, United States, 3/10/04.

Low-Power Micro-Scale CMOS-Compatible Silicon Sensor on a Suspended Membrane. / Kovalgin, A.Y.; Holleman, J.; Iordache, G. et al.
Microfabricated Systems and MEMS VII : proceedings of the international symposium. ed. / J.L. Davidson; P.J. Hesketh; D. Mistra; S. Shoji. Pennington, NJ: Electrochemical Society, 2004. p. 173-183.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

TY - GEN

T1 - Low-Power Micro-Scale CMOS-Compatible Silicon Sensor on a Suspended Membrane

AU - Kovalgin, A.Y.

AU - Holleman, J.

AU - Iordache, G.

AU - Jenneboer, T.

AU - Falke, F.

AU - Zieren, V.

AU - Goossens, M.

N1 - Conference code: 7

PY - 2004

Y1 - 2004

N2 - In this paper we describe a new, simple and cheap silicon device operating at high temperature at a very low power of a few mW. The essential part of the device is a nano-size conductive link 10-100 nm in size (the so-called antifuse) formed in between two poly-silicon electrodes separated by a thin SiO2 layer. The device can be utilized in chemical sensors or chemical micro-reactors requiring high temperature and very low power consumption e.g. in portable, battery operated systems. As a direct application, we mention a gas sensor (i.e. Pellistor) for hydrocarbons (butane, methane, propane, etc.) based on temperature changes due to the catalytic combustion of hydrocarbons. The power consumed by our device is at about 2% of the power consumed by conventional Pellistors.

AB - In this paper we describe a new, simple and cheap silicon device operating at high temperature at a very low power of a few mW. The essential part of the device is a nano-size conductive link 10-100 nm in size (the so-called antifuse) formed in between two poly-silicon electrodes separated by a thin SiO2 layer. The device can be utilized in chemical sensors or chemical micro-reactors requiring high temperature and very low power consumption e.g. in portable, battery operated systems. As a direct application, we mention a gas sensor (i.e. Pellistor) for hydrocarbons (butane, methane, propane, etc.) based on temperature changes due to the catalytic combustion of hydrocarbons. The power consumed by our device is at about 2% of the power consumed by conventional Pellistors.

M3 - Conference contribution

SN - 1-56677-422-5

SP - 173

EP - 183

BT - Microfabricated Systems and MEMS VII : proceedings of the international symposium

A2 - Davidson, J.L.

A2 - Hesketh, P.J.

A2 - Mistra, D.

A2 - Shoji, S.

PB - Electrochemical Society

CY - Pennington, NJ

T2 - Microfabricated Systems and MEMS-VII Symposium at the 206th ECS Meeting 2004

Y2 - 3 October 2004 through 8 October 2004

ER -

Low-Power Micro-Scale CMOS-Compatible Silicon Sensor on a Suspended Membrane

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