Low-power Micro-Scale CMOS-Copatible Silicon Sensor on a Suspended Membrane

Alexeij Y. Kovalgin, G. Iordache, J. Holleman

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

    Original languageUndefined
    Title of host publicationMeeting abstracts 206th Meeting of the Electrochemical Society
    Place of PublicationHonolulu, USA
    Pages-
    Publication statusPublished - 2 Oct 2004

    Publication series

    Name
    Volume2588

    Keywords

    • METIS-218841

    Cite this

    Kovalgin, A. Y., Iordache, G., & Holleman, J. (2004). Low-power Micro-Scale CMOS-Copatible Silicon Sensor on a Suspended Membrane. In Meeting abstracts 206th Meeting of the Electrochemical Society (pp. -). Honolulu, USA.