Low-power Micro-Scale CMOS-Copatible Silicon Sensor on a Suspended Membrane

Alexeij Y. Kovalgin, G. Iordache, J. Holleman

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

    Original languageUndefined
    Title of host publicationMeeting abstracts 206th Meeting of the Electrochemical Society
    Place of PublicationHonolulu, USA
    Pages-
    Publication statusPublished - 2 Oct 2004
    Event206th Meeting of the Electrochemical Society 2004 - Honolulu, USA
    Duration: 2 Oct 200410 Oct 2004

    Publication series

    Name
    Volume2588

    Conference

    Conference206th Meeting of the Electrochemical Society 2004
    CityHonolulu, USA
    Period2/10/0410/10/04

    Keywords

    • METIS-218841

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