@inproceedings{582f4732d53342069fabbef0a288d092,
title = "Low-Pressure CVD of Germanium-Silicon Films using Silane and Germane Sources",
keywords = "METIS-202143",
author = "Kovalgin, {Alexeij Y.} and J. Holleman and Cora Salm and P.H. Woerlee",
year = "2001",
month = oct,
day = "22",
language = "English",
isbn = "1-56677298-2",
series = "Proceedings",
publisher = "Electrochemical Society",
pages = "269--275",
booktitle = "Thin Film Transistor Technologies V",
note = "5th Symposium on Thin Film Transistor Technologies, TFTT 2000, TFTT ; Conference date: 23-10-2000 Through 25-10-2000",
}