Low-resistivity molybdenum obtained by atomic layer deposition

Kees van der Zouw*, Bernhard Y. van der Wel, Antonius A.I. Aarnink, Rob A.M. Wolters, Dirk J. Gravesteijn, Alexey Y. Kovalgin

*Corresponding author for this work

Research output: Contribution to journalArticleAcademicpeer-review

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