An integrated arrayed-waveguide grating (AWG) fabricated in silicon oxynitride (SiON) technology is used as the wavelength separation and selection element for Raman spectroscopy. With a spectral resolution of 5.5 nm and a free spectral range of 215 nm, the AWG enables wavelength separation of the full Raman fingerprint region in a single diffraction order without order overlap. It is demonstrated that Raman signal detection of cyclohexane with the AWG is feasible and that the information on position and relative intensities of the Raman bands of cyclohexane are preserved. A detailed description of the signal processing methodology to obtain AWG-based Raman measurements corrected for instrument response is presented. The Raman measurement based on the integrated intensity output of the device corresponds well to the expected relative intensity channel output of the AWG. Raman information based on band intensity ratios from the AWG channels is also preserved compared with the spectral integration of bands, with a maximum relative error of 9% attributed to some light that might have leaked from the channels to the device substrate. These results are a step towards the realization of a technology suitable for dedicated, low-cost, miniaturized Raman devices.
- IOMS-PIT: PHOTONICS INTEGRATION TECHNOLOGY
- Low resolution
- Raman spectroscopy
- Arrayed waveguide grating
- Single-diffraction order