Low-Stress Highly-Conductive In-Situ Boron Doped Ge0.7Si0.3 Films by LPCVD

S.N.R. Kazmi, Alexeij Y. Kovalgin, Antonius A.I. Aarnink, Cora Salm, Jurriaan Schmitz

    Research output: Contribution to journal › Article › Academic › peer-review

    5 Citations (Scopus)
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