Low Stress In Situ Boron Doped Poly SiGe Layers for MEMS Modular Integration with CMOS

S.N.R. Kazmi, Antonius A.I. Aarnink, Alexeij Y. Kovalgin, Cora Salm, Jurriaan Schmitz

    Research output: Contribution to journal › Article › Academic › peer-review

    2 Citations (Scopus)
    14 Downloads (Pure)

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